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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >New electrode separation technology using anodic oxidation and application to SAW interdigital transducers
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New electrode separation technology using anodic oxidation and application to SAW interdigital transducers

机译：使用阳极氧化的新电极分离技术及其在SAW叉指换能器中的应用

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摘要

By anodic oxidation of the edges of the portions of the Al film under photoresist, controllable gaps between electrodes with good insulation can be obtained. These techniques are applied to realize a surface-acoustic-wave (SAW) narrow gap interdigital transducer (NG-IDT) and narrow gap unidirectional transducer (NG-UDT). The experimental result shows 7.2 dB insertion loss with amplitude ripples of +or-1.2 dB for a conventional NG-IDT. Directives of 3-dB/transducer at 440 MHz (fundamental) and 13-dB transducer at 870 MHz (second-harmonic operation) for a new floating electrode type unidirectional transducer (NG-FEUDT) are demonstrated. Also a three transducer low loss filter using a combination of NG-IDT and NG-FEUDT exhibits 3.46 dB insertion loss at 894 MHz (second-harmonic operation, electrode width of 1.7 mu m) with sidelobe suppression greater than 35 dB.
机译：通过在光致抗蚀剂下对Al膜的各部分的边缘进行阳极氧化，可以获得具有良好绝缘性的电极之间的可控间隙。这些技术被应用于实现表面声波（SAW）窄间隙叉指式换能器（NG-IDT）和窄间隙单向换能器（NG-UDT）。实验结果表明，对于常规NG-IDT，插入损耗为7.2 dB，幅度纹波为+或-1.2 dB。演示了针对新型浮动电极型单向换能器（NG-FEUDT）的3 dB /换能器在440 MHz（基本）和13 dB换能器在870 MHz（二次谐波操作）的指令。同样，结合使用NG-IDT和NG-FEUDT的三传感器低损耗滤波器在894 MHz处表现出3.46 dB的插入损耗（二次谐波运行，电极宽度为1.7μm），旁瓣抑制大于35 dB。

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