Thin films of LiNbO have been RF sputter deposited on silicon and sapphire substrates. A number of analytical techniques have been used to determine the physical structure of these films. This analysis shows that the resulting films are stoichiometric LiNbO/sub 3/ and oriented polycrystalline in nature. It is now possible to consider applications which utilize the unique properties of these films.
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机译：LiNbO薄膜已被RF溅射沉积在硅和蓝宝石衬底上。已经使用许多分析技术来确定这些膜的物理结构。该分析表明，所得膜本质上是化学计量的LiNbO / sub 3 /并取向为多晶。现在可以考虑利用这些薄膜独特性能的应用。
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