Theoretical analysis of planar bulk-acoustic-wave response

Elias E.; Jhunjhunwala A.

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Theoretical analysis of planar bulk-acoustic-wave response

机译：平面体声波响应的理论分析

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A detailed theoretical analysis for planar bulk-acoustic-wave (BAW) devices that results in a method for computing the bulk-acoustic-wave response for any orientation of any piezoelectric substrate is presented. The BAW responses for four devices is computed and are found to be in excellent agreement with published experimental results. The theory is used to optimize one of these devices by varying the thickness and interdigital transducer (IDT) separation so as to give minimum insertion loss. A similar optimization can be performed for other devices. The theory is also used to find a new BAW device with low insertion loss.

机译：提出了对平面体声波（BAW）器件的详细理论分析，提出了一种计算任何压电基板任何方向的体声波响应的方法。计算了四个设备的BAW响应，发现它们与已发布的实验结果非常吻合。该理论用于通过改变厚度和叉指换能器（IDT）的间距来优化这些设备之一，从而使插入损耗最小。可以对其他设备执行类似的优化。该理论还被用于寻找一种具有低插入损耗的新型BAW器件。

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《IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control》 |1990年第1期|P.2-12|共11页
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Elias E.; Jhunjhunwala A.;
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Theoretical analysis of planar bulk-acoustic-wave response

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