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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Optimized Stoneley wave device by proper choice of glass overcoat
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Optimized Stoneley wave device by proper choice of glass overcoat

机译：通过适当选择玻璃外衣来优化Stoneley波装置

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摘要

The characteristics of a Stoneley wave propagated along an interface between a piezoelectric material and an isotropic material were investigated both theoretically and experimentally. First, the condition for the existence of Stoneley waves was shown for various piezoelectric materials. A rule of thumb for selecting the combination of the two materials was obtained. Then, LiTaO/sub 3/ was selected as the piezoelectric material and SiO/sub 2/ was selected the isotropic material. After the calculation of the Stoneley wave characteristics, actual devices were fabricated and measured. The experimental results were found to be in good agreement with the theory; zero slope temperature and high electromechanical coupling coefficient (K/sup 2/=1.5%) were obtained for Stoneley wave propagation between SiO/sub 2//X-148 degrees LiTaO/sub 3/. As a result, future surface-acoustic-wave (SAW) devices can be made without any package.
机译：从理论上和实验上研究了沿压电材料和各向同性材料之间的界面传播的斯通利波的特性。首先，显示了各种压电材料存在斯通利波的条件。获得了选择两种材料的组合的经验法则。然后，选择LiTaO / sub 3 /作为压电材料，并且选择SiO / sub 2 /作为各向同性材料。在计算斯通利波特性之后，制造并测量了实际的器件。实验结果与理论吻合良好。在SiO / sub 2 // X-148度LiTaO / sub 3 /之间的斯通利波传播中，获得了零斜率温度和高机电耦合系数（K / sup 2 / = 1.5％）。结果，可以在没有任何封装的情况下制造未来的表面声波（SAW）设备。

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