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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >High-Performance SAW Resonator With Simplified LiTaO3/SiO2 Double Layer Structure on Si Substrate
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High-Performance SAW Resonator With Simplified LiTaO3/SiO2 Double Layer Structure on Si Substrate

机译：具有简化LiTaO 3 / SiO 2 双层结构的高性能锯谐振器

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In response to the increased mobile data traffic, there is a growing need for more low-loss RF band filters with steep frequency characteristics, and high-quality (Q)-factor and low-temperature coefficient of frequency (TCF) resonators are required to achieve this. We previously reported that for a surface acoustic wave (SAW) resonator on a three-layer structure, which is composed of a thin LiTaO3 (LT) plate whose orientation is 50 degrees rotated YX propagation, SiO2 layer, and AlN layer on a Si substrate, a Q-factor several times higher than that of an SAW resonator on a standard 42 degrees rotated YX propagation LiTaO3 (42YX-LT) substrate could be obtained. In this study, we investigated this layer structure and found that a two-layer structure, in which the AlN layer is removed, achieves a high Q-factor. Numerical analyses using a finite element method showed that the acoustic wave energy can be confined to the surface of the two-layer substrate, and the TCF and electromechanical coupling coefficient (k(2)) were improved by optimizing the thickness of each layer. We fabricated and evaluated prototype one-port resonators with the twolayer structure and the standard 42YX-LT SAW substrate with resonant frequencies from 0.95 to 3.6 GHz. An improvement of the Q-factor of 3 to 4 times compared with that of the resonator with standard 42YX-LT substrate was observed for the two-layer structure, which means that a reduction of complexity of the layer structure could be obtained without performance loss. The two-layer structure was applied to a 2.4-GHz band Wi-Fi filter to achieve high performances such as low-loss, better steepness, and high attenuation.
机译：响应于增加的移动数据流量，越来越需要具有陡峭频率特性的更低损耗RF带滤波器，并且需要高质量（Q） - 因子和低温系数（TCF）谐振器实现这一目标。我们之前报道的是，对于三层结构的表面声波（SAW）谐振器，其由薄LiTaO3（LT）板组成，其取向为50度旋转YX传播，Si 2层和AlN层在Si衬底上，可以获得比标准42度旋转YX传播LiTaO3（42yx-LT）衬底高出多于SAW谐振器的Q系数。在这项研究中，我们研究了该层结构，发现，除了除去AlN层的双层结构，实现了高Q系数。使用有限元方法的数值分析表明，声波能量可以限制在双层基板的表面上，通过优化每层的厚度，改善了TCF和机电耦合系数（K（2））。我们用双层结构和标准的42yx-LT SAW基板制造和评估了原型单端口谐振器，谐振频率为0.95至3.6 GHz。对于双层结构，观察到具有标准42yx-LT基板的谐振器的Q系数的提高3至4次，这意味着可以在没有性能损失的情况下获得层结构的复杂性的降低。将双层结构应用于2.4-GHz带Wi-Fi过滤器，以实现高表现，例如低损耗，更好的陡度和高衰减。

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