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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Broadband Ultrasonic Array Transducer From Multilayer Piezoelectric Ceramic With Lowered Co-Firing Temperature
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Broadband Ultrasonic Array Transducer From Multilayer Piezoelectric Ceramic With Lowered Co-Firing Temperature

机译：来自多层压电陶瓷的宽带超声波阵列传感器，具有降低的共用温度

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摘要

Increasing array transducer bandwidth (BW) and signal-to-noise ratio (SNR) is a critical issue for producing a high-quality medical ultrasound image. However, array elements with small size tend to have poor sensitivity due to a much higher impedance compared with the electrical impedance of the transmitter and receiver circuit. Implementation of multilayer ceramic (MLC) is an effective way of reducing impedance, and thus, with a potential for improving SNR for an ultrasonic probe. In this work, we fabricated multilayer piezoelectric ceramic with a composition of 0.1Pb(Ni1/3Nb2/3)O-3-0.35Pb(Zn1/3Nb2/3)O-3-0.15Pb(Mg1/3Nb2/3)O-3-0.1PbZrO(3)-0.3PbTiO(3)-4mol% excess NiO (PNN-PZN-PMN-PZ-PT), by a roll to roll tape casting process and co-fired with 90Ag/10Pd electrode at a low temperature of 950 degrees C. Using five-layer MLC (5L-MLC) as obtained, we designed and demonstrated a 5 MHz 32-element array transducer for ultrasonic and photoacoustic imaging. The five-layer transducer element exhibited a BW of 87% at -6 dB, substantially higher than 62% for single-layer ceramic (SLC) element. In addition, the insertion loss was improved by 16.2 dB over the SLC element with an external impedance of $50Omega $ . Both the experimental results and theoretical analysis showed that our array transducer made of the PNN-PZN-PMN-PZ-PT MLC is promising for acquiring high-quality ultrasonic and photoacoustic images.
机译：增加阵列换能器带宽（BW）和信噪比（SNR）是生产高质量医学超声图像的关键问题。然而，由于发射器和接收器电路的电阻抗相比，具有小尺寸的阵列元件倾向于具有较差的敏感性。多层陶瓷（MLC）的实施是降低阻抗的有效方法，因此具有改善超声波探针的SNR的可能性。在这项工作中，我们用0.1pb（Ni1 / 3nb2 / 3）O-3-0.35pb（Zn1 / 3nb2 / 3）O-3-0.15pb（Mg1 / 3nb2 / 3）O-的组成制造了多层压电陶瓷3-0.1pbzro（3）-0.3pbtio（3）-4mol％过量的NIO（PNN-PZN-PZ-PZ-PT），通过卷卷胶带铸造过程，并在低温下与90AG / 10PD电极共用温度为950℃。使用如获得的五层MLC（5L-MLC），我们设计并演示了用于超声波和光声成像的5MHz 32元件阵列换能器。五层换能器元件在-6dB处显示出87％的BW，对于单层陶瓷（SLC）元件，基本上高于62％。此外，在SLC元件上通过16.2dB提高了插入损耗，外部阻抗为50美元 omega $。实验结果和理论分析表明，我们的阵列传感器由PNN-PZN-PMN-PZ-PT MLC制成的阵列传感器是有希望获得高质量的超声波和光声图像。

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