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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >High-Q Support Transducer MEMS Resonators Enabled Low-Phase-Noise Oscillators
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High-Q Support Transducer MEMS Resonators Enabled Low-Phase-Noise Oscillators

机译：高Q支持传感器MEMS谐振器使能低相位噪声振荡器

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摘要

Structural and electrode material engineering methodology to attain quality factor enhancement in a support transducer enabled Wine-glass and Lame mode resonator has been demonstrated in this work. To boost the quality factor, a series of short mechanical couplers is utilized to link the central resonant structure with the piezoelectric transducer arms. Two different top electrode materials are investigated, and the effect of metal loading on the performance of aluminum nitride (AlN)-on-Si-based resonator is investigated in detail. The new resonator design strategy improves the quality factor of the Wine-glass resonator from 9800 to 16 300 while still being able to maintain a spurious-free spectrum for a 200-MHz span, which is crucial for oscillator applications. An optimized oscillation system is realized using a commercially available low-noise amplifier. Careful positioning of the passive components is utilized to attain an ideal operating point for the resonator in the closed-loop condition. Using this scheme, Wine-glass and Lame mode resonator-based high-performance oscillators with a low phase noise of -133.6 and -132.7dBc/Hz at 1-kHz offset and -153.7 and -150.4 dBc/Hz at 1-MHz offset, respectively, which satisfy that the Global System for Mobile (GSM) communication requirements are attained when normalized to a 13-MHz carrier frequency.
机译：在这项工作中已经证明了在支持传感器的葡萄酒玻璃和跛行模式谐振器中获得支撑换能器质量因数增强的结构和电极材料工程方法。为了提高质量因子，利用一系列短机械耦合器将中央谐振结构与压电换能器臂联系起来。研究了两种不同的顶电极材料，并详细研究了金属负载对氮化铝（ALN）-SI-Si-Si的谐振器性能的影响。新的谐振器设计策略将葡萄酒玻璃谐振器的质量因数改善了9800至16 300的质量因子，同时仍然能够维持200-MHz跨度的无尺寸频谱，这对于振荡器应用至关重要。使用市售的低噪声放大器实现优化的振荡系统。仔细定位被动部件的定位以在闭环条件下达到谐振器的理想操作点。使用该方案，葡萄酒玻璃和跛行模式谐振器的高性能振荡器，低相位噪声为133.6和-132.7dBc / Hz，1-kHz偏移和-153.7和-150.4 DBC / Hz，1-MHz偏移分别满足于当归一化为13MHz载波频率时实现全球移动系统（GSM）通信要求的全局系统。

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