A Solidly Mounted Resonator Fabricated by LiNbO<sub>3</sub> Single-Crystalline Film on Flexible Polyimide Substrate

Huang Shitian; Luo Wenbo; Bai Xiaoyuan; Lv Lu; Pan Xinqiang; Shuai Yao; Wu Chuangui; Zhang Wanli

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A Solidly Mounted Resonator Fabricated by LiNbO₃ Single-Crystalline Film on Flexible Polyimide Substrate

机译：柔性聚酰亚胺基板上的LINBO _{3 单晶膜制造的牢固安装谐振器}

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A solidly mounted resonator on flexible polyimide (PI) substrate with high-effective coupling coefficient (K-t(2)) of 14.06% is reported in this article. This high K-t(2) is resulting from the LiNbO3 (LN) single-crystalline film and [SiO2/Mo](3) Bragg reflector. The quality of LN film fabricated by the crystal-ion-slicing (CIS) technique using benzocyclobutene (BCB) bonding layer was close to the bulk crystalline LN. The interfaces of the Al/LN/Al/[SiO2/Mo](3) Bragg reflector/BCB/PI multilayer are sharp, and the thickness of each layer is consistent with its design value. The resonant frequency and K-t(2) keep stable when it is bent at different radii. These results demonstrate a feasible approach to realizing RF filters on flexible polymer substrates, which is an indispensable device for building integrated and multifunctional wireless flexible electronic systems.

机译：本文报道了具有高效耦合系数（K-T（2））的柔性聚酰亚胺（PI）衬底上的稳定安装的谐振器，为14.06％。该高K-T（2）由LiNbO 3（LN）单晶膜和[SiO 2 / Mo]（3）布拉格反射器产生。使用苯并环丁烯（BCB）粘合层的晶体离子切片（CIS）技术制造的LN膜的质量靠近散装晶体LN。 Al / Ln / Al / [SiO2 / Mo]（3）布拉格反射器/ BCB / PI多层尖锐的界面是尖锐的，并且每层的厚度与其设计值一致。当在不同的半径弯曲时，谐振频率和K-T（2）保持稳定。这些结果表明了一种可行的方法来实现柔性聚合物基板上的RF过滤器，这是用于构建集成和多功能无线柔性电子系统的不可缺少的装置。

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《IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control》 |2021年第7期|2585-2589|共5页
作者
Huang Shitian; Luo Wenbo; Bai Xiaoyuan; Lv Lu; Pan Xinqiang; Shuai Yao; Wu Chuangui; Zhang Wanli;
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Univ Elect Sci & Technol China Sch Elect Sci & Engn Chengdu 610054 Peoples R China;

Univ Elect Sci & Technol China Sch Elect Sci & Engn Chengdu 610054 Peoples R China|Univ Elect Sci & Technol China State Key Lab Elect Thin Films & Integrated Devic Chengdu 610054 Peoples R China;

Univ Elect Sci & Technol China Sch Elect Sci & Engn Chengdu 610054 Peoples R China;

Univ Elect Sci & Technol China Sch Elect Sci & Engn Chengdu 610054 Peoples R China;

Univ Elect Sci & Technol China Sch Elect Sci & Engn Chengdu 610054 Peoples R China;

Univ Elect Sci & Technol China Sch Elect Sci & Engn Chengdu 610054 Peoples R China|Univ Elect Sci & Technol China State Key Lab Elect Thin Films & Integrated Devic Chengdu 610054 Peoples R China;

Univ Elect Sci & Technol China Sch Elect Sci & Engn Chengdu 610054 Peoples R China|Univ Elect Sci & Technol China State Key Lab Elect Thin Films & Integrated Devic Chengdu 610054 Peoples R China;

Univ Elect Sci & Technol China Sch Elect Sci & Engn Chengdu 610054 Peoples R China|Univ Elect Sci & Technol China State Key Lab Elect Thin Films & Integrated Devic Chengdu 610054 Peoples R China;

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正文语种 eng
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关键词
Crystal-ion-slicing (CIS) technique; flexible polyimide PI) substrate; high-effective coupling coefficient; LiNbO3 single-crystalline film; solidly mounted resonator;

机译：晶体离子切片（CIS）技术;柔性聚酰亚胺PI）衬底;高效耦合系数;LINBO3单晶膜;牢固安装的谐振器;

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2. Mo Back Contact for Flexible-Polyimide Substrate Cu(In, Ga)Se2 Thin-Film Solar Cells [J] . ZHANG Li, HE Qing, JIANG Wei-long, 中国物理快报：英文版 . 2008,第009期
3. Flexible Cu(In,Ga)Se2 Thin-Film Solar Cells on Polyimide Substrate by Low-Temperature Deposition Process [J] . ZHANG Li, HE Qing, JIANG Wei-Long, 中国物理快报：英文版 . 2008,第002期
4. Theoretical Analysis of Solidly Mounted Film Bulk Acoustic Resonator with Nanocrystalline Diamond as High Impedance Material of Bragg Reflector [J] . Yujia E, Sen Zhang, Bing Dai, 哈尔滨工业大学学报（英文版） . 2021,第002期
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8. Single-crystalline Ge p-channel thin-film transistors with Schottky-barrier source/drain on flexible polyimide substrates [C] . Hsu William, Lin C.-M., Peng C.-Y., Proceedings of 2010 International Symposium on VLSI Technology, System and Application . 2010

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A Solidly Mounted Resonator Fabricated by LiNbO3 Single-Crystalline Film on Flexible Polyimide Substrate

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A Solidly Mounted Resonator Fabricated by LiNbO₃ Single-Crystalline Film on Flexible Polyimide Substrate