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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Dual-Frequency CMUT Arrays for Multiband Ultrasound Imaging Applications
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Dual-Frequency CMUT Arrays for Multiband Ultrasound Imaging Applications

机译：用于多频带超声成像应用的双频CMUT阵列

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摘要

Dual-frequency capacitive micromachined ultrasonic transducers (CMUTs) are introduced for multiscale imaging applications, where a single array transducer can be used for both deep low-resolution imaging and shallow high-resolution imaging. These transducers consist of low- and high-frequency membranes interlaced within each subarray element. They are fabricated using a modified sacrificial release process. Successful performance is demonstrated using wafer-level vibrometer testing, as well as acoustic testing on wirebonded dies consisting of arrays of 2- and 9-MHz elements of up to 64 elements for each subarray. The arrays are demonstrated to provide multiscale, multiresolution imaging using wire phantoms and can span frequencies from 2 MHz up to as high as 17 MHz. Peak transmit sensitivities of 27 and 7.5 kPa/V are achieved with the low- and high-frequency subarrays, respectively. At 16-mm imaging depth, lateral spatial resolution achieved is 0.84 and 0.33 mm for low- and high-frequency subarrays, respectively. The signal-to-noise ratio of the low-frequency subarray is significantly higher for deep targets compared to the high-frequency subarray. The array achieves multiband imaging capabilities difficult to achieve with current transducer technologies and may have applications to multipurpose probes and novel contrast agent imaging schemes.
机译：为多尺度成像应用引入了双频电容微机械超声换能器（CMUT），其中单个阵列换能器可用于深度低分辨率成像和浅高分辨率成像。这些换能器由在每个子阵列元件内隔离的低频和高频膜组成。它们使用改性牺牲释放过程制造。使用晶圆级振动器测试证明了成功的性能，以及由2-和9-MHz元素组成的线路和9-MHz元素的阵列，每个子阵列组成的阵列。阵列被证明是使用电线幻影提供多尺度，多分辨率成像，并且可以将2 MHz的频率从2 MHz频率高达17 MHz。利用低频和高频子阵列实现了27和7.5kPa / v的峰值透射敏感性。在16毫米的成像深度，横向空间分辨率分别实现为0.84和0.33mm，分别用于低频和高频子阵列。与高频子阵列相比，低频子阵列的低频子阵列的信噪比显着更高。该阵列实现了多频带成像功能难以实现当前的传感器技术，并且可以具有多用途探针和新型造影剂成像方案的应用。

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