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首页> 外文期刊>Industrial Electronics, IEEE Transactions on >Modeling and Analysis of a New Cylindrical Magnetic Levitation Gravity Compensator With Low Stiffness for the 6-DOF Fine Stage
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Modeling and Analysis of a New Cylindrical Magnetic Levitation Gravity Compensator With Low Stiffness for the 6-DOF Fine Stage

机译：一种新型低刚度圆柱六自由度磁悬浮重力补偿器的建模与分析

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摘要

A novel cylindrical magnetic levitation gravity compensator (MLGC) with low-stiffness and vacuum-compatible characteristics is proposed in this paper. This compensator can be used as the out-of-plane electromagnetic actuator for the 6-DOF fine stage in certain high-precision positioning applications, for example, the wafer stage in a lithography machine. Compared with conventional actuators such as the electromagnet and voice coil motor, the heat and the resulting temperature rise that degrade the stage positioning accuracy can be reduced by using passive magnetic gravity compensation. Based on the equivalent current method, the analytical equations for the magnetic field, static levitation force, vertical stiffness, and dynamic levitation force are derived. However, the static levitation force–vertical displacement characteristic from the traditional analytical model is not sufficiently accurate for the low-stiffness applications when compared with the finite-element model. Therefore, the main reason for the model error is analyzed, and an improved semianalytical method based on a single-point magnetostatic field simulation is proposed. This method offers a theoretical basis for the analysis and design of the low-stiffness MLGC.
机译：提出了一种新型的具有低刚度和真空兼容特性的圆柱磁悬浮重力补偿器（MLGC）。该补偿器可用作某些高精度定位应用中的6自由度精细平台的平面外电磁致动器，例如光刻机中的晶圆平台。与传统的执行器（例如电磁体和音圈电机）相比，可以通过使用被动磁重力补偿来减少热量以及由此引起的温度升高，从而降低平台的定位精度。基于等效电流法，导出了磁场，静态悬浮力，垂直刚度和动态悬浮力的解析方程。但是，与有限元模型相比，传统分析模型的静态悬浮力-垂直位移特性对于低刚度应用而言不够准确。因此，分析了引起模型误差的主要原因，提出了一种基于单点静磁场仿真的改进半解析方法。该方法为低刚度MLGC的分析和设计提供了理论依据。

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