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首页> 外文期刊>IEEE Transactions on Industrial Electronics >High-Precision Incremental Capacitive Angle Encoder Developed by Micro Fabrication Technology
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High-Precision Incremental Capacitive Angle Encoder Developed by Micro Fabrication Technology

机译：通过微制造技术开发的高精度增量电容角度编码器

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摘要

This article proposes a high-precision incremental capacitive angle encoder based on microfabrication technology. Compared to traditional printed circuit board technology, the encoder manufactured by microfabrication technology has higher processing accuracy and better temperature characteristics. Further, the microfabrication technology makes the encoder obtain larger sensitive capacitances and achieve more electrical cycle divisions within a smaller volume. To overcome the effect of the parasitic parameters led by microfabrication technology, electric models were established and analyzed, and the solution was proposed. First, to reduce the parasitic capacitance coupling to the ground, the process materials and fabrication steps are improved and optimized. Then, a differential structure on excitation voltage wires is adopted to minimize the nonlinear error on the measurement results. In addition, the collection electrode interconnection model is optimized to reduce parasitic parameters on the collection and enhance the signal to noise ratio. Both analytical calculation and finite-element analysis results verified the feasibility of the improvement and optimization. Finally, the optimized prototype is fabricated and measured, and the result shows that the prototype can achieve 0.0002 degrees measurement resolution and 0.0012 degrees measurement accuracy within a 58 mm diameter.
机译：本文提出了一种基于微加工技术的高精密增量电容式角度编码器。与传统印刷电路板技术相比，通过微型制作技术制造的编码器具有更高的加工精度和更好的温度特性。此外，微型加工技术使编码器获得更大的敏感电容并在较小的体积内实现更多的电循环分割。为了克服通过微型制备技术LED的寄生参数的效果，建立和分析了电模型，提出了解决方案。首先，为了降低寄生电容耦合到所述地面，所述方法的材料和制造步骤得以改善和优化。然后，在激发电压线的差分结构被采用以最小化对测量结果的非线性误差。此外，所述收集电极互连模型被优化，以减少在收集寄生参数和提高信号噪声比。既分析计算和有限元分析的结果证实了改进和优化的可行性。最后，将优化的原型制作和测定，结果表明，该原型可直径58毫米内达到0.0002度的测量分辨率和0.0012度的测量精度。

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