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首页> 外文期刊>IEEE Transactions on Industrial Electronics >Modeling and Controller Design of a Precision Hybrid Scanner for Application in Large Measurement-Range Atomic Force Microscopy
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Modeling and Controller Design of a Precision Hybrid Scanner for Application in Large Measurement-Range Atomic Force Microscopy

机译：应用于大量程原子力显微镜的精密混合扫描仪的建模和控制器设计

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摘要

In this paper, we have developed a novel large measurement-range atomic force microscopy (AFM) system performing the tapping mode operation. This system consists of a compact/low-cost scanning probe-type sensing system ($z$-scanner) and a hybrid $xy$-scanner. To achieve precision measurement through image scan of given samples, a thorough mathematical modeling is established first, and an advanced robust adaptive controller is then proposed, which can deal with unknown parameters, cross-talk effects, external disturbances, and unknown hysteresis phenomena. The salient properties of the resulting closed-loop AFM system includes long traveling range, high precision, and fast response after integrating two kinds of actuations. To demonstrate and qualify the scanning capability of the proposed system, systematic experiments have been conducted.
机译：在本文中，我们已经开发了一种新型的大测量范围原子力显微镜（AFM）系统，可以执行攻丝模式操作。该系统由紧凑/低成本的扫描探针式传感系统（$ z $ -scanner）和混合型$ xy $ -scanner组成。为了通过给定样本的图像扫描实现精确测量，首先建立了完整的数学模型，然后提出了一种先进的鲁棒自适应控制器，该控制器可以处理未知参数，串扰效应，外部干扰和未知磁滞现象。最终的闭环AFM系统的显着特性包括长行程范围，高精度和集成两种驱动方式后的快速响应。为了演示和验证所提出系统的扫描能力，已进行了系统的实验。

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