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Synthesis of Lithium Niobate during Crystallization of Amorphous Li-Nb-O Film

机译：无定形Li-Nb-O膜结晶过程中铌酸锂的合成

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摘要

The structural and phase changes induced by heat treatment (HT) and brief lamp processing (LP) in 70- and 1500-nm-thick Li-Nb-O films similar in elemental composition to LiNbO3, grown on the surface of unheated substrates (monocrystalline Si wafer and NaCl single crystal) by rf magnetron sputtering and ion-beam sputtering of a LiNbO3 target have been studied by reflection high-energy electron diffraction and X-ray diffraction. The as-grown films were extremely nanostructured and consisted of crystalline lithium oxides, niobium oxides, and LiNbO3 as the product of reaction between them. We have demonstrated the conceptual feasibility of driving the synthesis of polycrystalline LiNbO3 films to completion using HT or brief LP. In the case of LP, LiNbO3 synthesis is three orders of magnitude faster than in the case of HT.
机译：通过元素组合物中的70-和1500nm厚的Li-Nb-O膜中的热处理（HT）和短灯处理（LP）引起的结构和相变（LP）在未加热的基材的表面上生长（单晶通过反射高能电子衍射和X射线衍射研究了通过RF磁控溅射和LINBO3靶的离子束溅射的Si晶片和NaCl单晶。生长的薄膜非常纳米结构并由结晶锂氧化物，氧化铌和LINBO 3组成，作为它们之间的反应产物。我们已经证明了使用HT或简短LP驱动合成多晶LINBO3薄膜的概念性可行性。在LP的情况下，LINBO3合成是比HT的情况更快的三个数量级。

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