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首页> 外文期刊>Inorganic materials >Phase composition, structure, and mechanical properties of arc PVD Mo-Si-Al and Mo-Si-Al-N coatings
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Phase composition, structure, and mechanical properties of arc PVD Mo-Si-Al and Mo-Si-Al-N coatings

机译：电弧PVD Mo-Si-Al和Mo-Si-Al-N涂层的相组成，结构和力学性能

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摘要

Using an arc physical vapor deposition process, we have produced nanostructured Mo-Si-Al coatings with a uniform distribution of equiaxed grains 8-12 nm in size and Mo-Si-Al-N coatings with a multilayer structure and a modulation period from 22 to 25 nm. The former coatings consist of MoSi2 and Mo and the latter consist of Mo2N and amorphous Si3N4 and AlN. The hardness of the Mo-Si-Al-N and Mo-Si-Al coatings is 41 and 18 GPa, respectively; they are similar in resistance to elastic deformation; and the Mo-Si-Al-N coating has a considerably higher resistance to plastic deformation. The coatings have roughly identical coefficients of friction (similar to 0.67-0.69 at 20A degrees C and similar to 0.52-0.56 at 550A degrees C), but the wear resistance of the Mo-Si-Al-N coating is higher by three and two orders of magnitude at 20 and 550A degrees C, respectively. The coatings of the two systems exhibit good adhesion to the substrate and cohesive fracture. Partial wear of the Mo-Si-Al and Mo-Si-Al-N coatings in the course of scratch testing occurs at indentation loads of 80 and 63 N, respectively.
机译：使用电弧物理气相沉积工艺，我们生产出纳米结构的Mo-Si-Al涂层，其等轴晶粒尺寸均匀分布，尺寸为8-12 nm，Mo-Si-Al-N涂层的多层结构，调制周期为22到25 nm前者的涂层由MoSi2和Mo组成，后者的涂层由Mo2N和非晶Si3N4和AlN组成。 Mo-Si-Al-N和Mo-Si-Al涂层的硬度分别为41 GPa和18 GPa。它们在弹性变形方面的抵抗力相似； Mo-Si-Al-N涂层具有相当高的抗塑性变形能力。涂层的摩擦系数大致相同（在20A摄氏度下类似于0.67-0.69，在550A摄氏度下类似于0.52-0.56），但是Mo-Si-Al-N涂层的耐磨性要高三到两倍数量级分别在20和550A摄氏度。两种体系的涂层均表现出对基材的良好粘合性和内聚性断裂。在划痕测试过程中，Mo-Si-Al和Mo-Si-Al-N涂层的部分磨损分别发生在80 N和63 N的压痕载荷下。

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