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Effect of Morphology of Catalyst Thin Film on Carbon Nanotube Growth

机译:催化剂薄膜的形貌对碳纳米管生长的影响

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摘要

The Ni catalyst films were deposited on single crystal Si by magnetron sputtering system. The surface morphologies of the films were controlled by varying the pretreatment temperature in NH3. We have investigated how the morphology of Ni after thermal treatment influences on the vertically aligned carbon nanotubes growth during thermal chemical vapor deposition. We found that the pretreatment temperature determined the grain size and density of the Ni catalyst that controlled the diameter, length, and density of carbon nanotubes. The degree of crystallization and order of the CNTs as a function of pretreatment temperature was further discussed by Raman spectrums. We found that more aligned and ordered samples correspond to lower I_(D)/I_(G) ratios.
机译:通过磁控溅射系统将Ni催化剂膜沉积在单晶Si上。通过改变NH 3中的预处理温度来控制膜的表面形态。我们研究了热处理后Ni的形貌如何在热化学气相沉积过程中影响垂直排列的碳纳米管的生长。我们发现,预处理温度决定了控制碳纳米管直径,长度和密度的Ni催化剂的晶粒尺寸和密度。通过拉曼光谱进一步讨论了CNT的结晶度和阶数与预处理温度的关系。我们发现更多对齐和有序的样本对应于较低的I_(D)/ I_(G)比率。

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  • 来源
    《Inorganic materials》 |2010年第10期|p.1072-1076|共5页
  • 作者

    Gang Li;

  • 作者单位

    Laboratory of Ministry of Education for Conveyance and Equipment, School of Mechanical and Electrical Engineering, East China Jiaotong University, Nanchang 330013, P.R. China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
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