Micro-mechanical stages with enhanced range

M. Dinesh; G. K. Ananthasuresh

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Micro-mechanical stages with enhanced range

机译：范围更大的微机械平台

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摘要

We present concepts and an optimization-based methodology for the design of micro-mechanical stages that have not only high precision but also an enhanced range. Joint-free distributed compliant designs provide high precision and easy manufacturability at macro and micro scales. The range of motion is enhanced by using displacement amplifying compliant mechanisms (DaCMs). The main issue addressed in this paper is how to retain the decoupling between the X and Y motions in the stage when it is equipped with DaCMs. The natural frequency of the stage is also not compromised in enhancing the range. The optimized design has 2.5 times more range than the designs reported in the literature. Furthermore, the sensitivity improved by a factor of two when the stage is optimized for an accelerometer.

机译：我们为微机械位移台的设计提出了概念和基于优化的方法，它们不仅具有很高的精度，而且具有更大的范围。无接头的分布式兼容设计可在宏观和微观尺度上提供高精度和易制造性。通过使用位移放大顺应机构（DaCM），可以扩大运动范围。本文所要解决的主要问题是，在装备DaCM的舞台上，如何保持X和Y运动之间的解耦。舞台的自然频率在扩大范围方面也不受影响。优化设计的范围是文献报道的设计的2.5倍。此外，当为加速度计优化平台时，灵敏度提高了两倍。

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来源
《International Journal of Advances in Engineering Sciences and Applied Mathematics》 |2010年第2期|p.35-43|共9页
作者
M. Dinesh; G. K. Ananthasuresh;
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作者单位

Indian Institute of Science, Bangalore, India General Electric, Bangalore, India;

Mechanical Engineering Department, Indian Institute of Science,Bangalore 560012, India;

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原文格式 PDF
正文语种 eng
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micro-actuators; compliant mechanisms; optimization methods; inertial sensors;

机译：微执行器;顺应机构;优化方法;惯性传感器;

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Micro-mechanical stages with enhanced range

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