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Non-Resonance Type Linear Ultrasonic Motor Using Multilayer Piezoelectric Actuators with Parallel Beams

机译:多层平行梁压电致动器的非共振型线性超声波电动机

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摘要

A linear ultrasonic motor (LUSM) with two parallel beams and two multilayer piezoelectric actuators (MPAs) has been developed. The MPAs are aligned across the beams, and the force and displacement generated by the MPAs result in the deformation of the beams in the orthogonal direction. The LUSM has two types of operation modes: dynamic and static. In dynamic operation, the MPAs are driven by alternating voltages with a phase difference, and elliptical displacement motions are generated on the surfaces of the beams. Objects touching the surfaces of the beams can be moved in the same direction by friction. In addition, micro positioning is available over a wide range by combining dynamic and static operations. The characteristics of the LUSM include a maximum speed of 41 mm/s and a maximum thrust of 3.4 N at an operating voltage of 20 V_(p-p). A movement range of approximately 8 μm has been confirmed during static operation.
机译:已经开发出具有两个平行梁和两个多层压电致动器(MPA)的线性超声电机(LUSM)。 MPA跨梁对齐,并且MPA产生的力和位移导致梁在正交方向上变形。 LUSM具有两种类型的操作模式:动态和静态。在动态操作中,MPA由具有相位差的交流电压驱动,并且在光束表面上产生椭圆形位移运动。接触光束表面的物体可以通过摩擦沿相同方向移动。此外,通过结合动态和静态操作,可以在很宽的范围内进行微定位。 LUSM的特性包括在20 V_(p-p)的工作电压下的最大速度为41 mm / s和最大推力为3.4N。在静态操作过程中已确认大约8μm的移动范围。

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