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Design and optimisation of microelectromechanical Systems: a review of the state-of-the-art

机译:微机电系统的设计和优化:最新技术回顾

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This article provides an inclusive review on the field of design and optimisation (DO) of microelectromechanical Systems (MEMS) since its emergence, about two decades ago. Fundamentals and applications of MEMS are presented herein, followed by a comprehensive review on the conventional tools and practices developed for MEMS DO throughout. The limitations of these techniques are identified, and the necessity for automated DO methods for MEMS technology is therefore justified and evaluated. A recent trend in DO of microsystems is inspired by the natural evolution and the survival of the littest hypothesises. Motivated by its achievements in other engineering DO problems, evolutionary computation has also been adopted for the DO of MEMS, at different levels. A thorough review of this infant area of research is also presented in this article and highlights of the main challenges facing this field are discussed. Prior to a major research in the area, this article provides an update of the state-of-the-art on MEMS technology with a general interest in the automated DO techniques, particularly, the evolutionary methods.
机译:自从大约二十年前出现以来,本文就微机电系统(MEMS)的设计和优化(DO)领域进行了全面的回顾。本文介绍了MEMS的基本原理和应用,然后全面回顾了为MEMS DO开发的常规工具和实践。确定了这些技术的局限性,因此证明并评估了用于MEMS技术的自动化DO方法的必要性。微系统溶解氧的最新趋势是受自然进化和最新假设的生存启发。受其在其他工程DO问题中取得的成就的启发,在不同层次上,MEMS DO也采用了进化计算。本文还对这一婴儿研究领域进行了全面回顾,并讨论了该领域面临的主要挑战的重点。在对该领域进行重大研究之前,本文提供了有关MEMS技术的最新信息,并对自动DO技术(尤其是进化方法)产生了普遍兴趣。

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