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首页> 外文期刊>International Journal of Heat and Mass Transfer >Determination of the thermal cycle during flash lamp annealing without a direct temperature measurement
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Determination of the thermal cycle during flash lamp annealing without a direct temperature measurement

机译：在不进行直接温度测量的情况下确定闪光灯退火期间的热循环

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摘要

Flash lamp annealing (FLA) is a modern annealing technique which, starting from microelectronics, has spread over new application areas like flexible electronics, photovoltaics or thin film deposition. Because of the short annealing time in the range of milliseconds and below, FLA allows the suppression of unwanted processes like diffusion, the annealing of temperature-sensible substrates, and the saving of process time and energy. In addition, it is predestined for roll-to-roll applications. However, the determination of the thermal cycle during FLA is challenging. The existing methods for a direct temperature measurement, mostly based on pyrometry, are elaborate and have to solve the problem to detect thermal radiation against the background of the intense flash light. An alternative way is simulation, but now an extended knowledge about the flash and the material system to be flashed is needed. In this work we describe a methodology to determine the thermal cycle during FLA without the need for a direct temperature measurement. This methodology is based on an optical-thermodynamic simulation and calibration experiments which can be implemented with reasonable effort under certain assumptions. The simulation considers not only the properties of the flash and the sample, but also the reflectivity of the chamber walls. Finally, the pros and cons of this methodology are shortly discussed. (C) 2018 Elsevier Ltd. All rights reserved.
机译：闪光灯退火（FLA）是一种现代退火技术，从微电子学开始，已扩展到新的应用领域，例如柔性电子学，光伏技术或薄膜沉积。由于毫秒级及以下范围内的短退火时间，FLA可以抑制有害工艺，如扩散，温度敏感型基板的退火以及节省工艺时间和能源。此外，它还适用于卷对卷应用。但是，确定FLA期间的热循环具有挑战性。现有的直接进行温度测量的方法（主要是基于高温测定法）非常复杂，必须解决在强闪光背景下检测热辐射的问题。一种替代方法是模拟，但是现在需要扩展有关闪光和要闪光的材料系统的知识。在这项工作中，我们描述了无需直接测量温度即可确定FLA期间热循环的方法。该方法基于光学热力学模拟和校准实验，可以在某些假设下以合理的努力来实施。模拟不仅考虑了闪光灯和样品的特性，还考虑了腔室壁的反射率。最后，将简要讨论这种方法的优缺点。 （C）2018 Elsevier Ltd.保留所有权利。

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  • 来源
  • 作者

    Rebohle L.; Neubert M.; Schumann T.; Skorupa W.;

  • 作者单位

    Helmholtz Zentrum Dresden Rossendorf, Inst Ion Beam Phys & Mat Res, Bautzner Landstr 400, D-01328 Dresden, Germany;

    Helmholtz Zentrum Dresden Rossendorf, Inst Ion Beam Phys & Mat Res, Bautzner Landstr 400, D-01328 Dresden, Germany;

    Helmholtz Zentrum Dresden Rossendorf, Inst Ion Beam Phys & Mat Res, Bautzner Landstr 400, D-01328 Dresden, Germany;

    Helmholtz Zentrum Dresden Rossendorf, Inst Ion Beam Phys & Mat Res, Bautzner Landstr 400, D-01328 Dresden, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Flash lamp annealing; Intense pulsed light; Photonic sintering; Temperature simulation;

    机译：闪光灯退火;强脉冲光;光子烧结;温度模拟;

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