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首页> 外文期刊>International Journal of Heat and Mass Transfer >Thermoelastic damping analysis for size-dependent microplate resonators utilizing the modified couple stress theory and the three-phase-lag heat conduction model
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Thermoelastic damping analysis for size-dependent microplate resonators utilizing the modified couple stress theory and the three-phase-lag heat conduction model

机译：利用改进的夫妻应力理论和三相滞后导热模型，依赖依赖脊椎板谐振器的热弹性阻尼分析

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摘要

Thermoelastic damping (TED) is considered to be a factor of significant energy loss in micro-scale structures, even at room temperature. The prediction of TED is therefore very important in the designing of micro-electro-mechanical system (MEMS) resonators with high-quality factors. When the thickness of the beams and plates are at microscale or nanoscale, the size-effect is needed to be considered. Couple stress theory is developed as a size-dependent continuum theory to deal with such problems. In the present work, an analytical expression for the quality factor (Q) of TED for size-dependent microplate resonators is derived by applying the modified couple stress theory (MCST) considering plane stress condition and the three-phase-lag (TPL) heat conduction model. We consider Kirchhoff microplate resonators and as case study, the effect of the length-scale parameter on the quality factor of TED are discussed in detail. To study the behavior of TED, the material of the microplate resonator is considered to be Silicon. The variations of TED as functions of the normalized frequency, microplate thickness, and length-scale parameter have been investigated. The effect of phase-lag parameters on TED has also been discussed. The results of the present model are compared to the existing results of the classical continuum theory. The present work investigates that the modified couple stress theory with small values of phase-lag parameters can increase the quality factor of microplate resonators with a smaller thickness.
机译：热弹性阻尼（TED）被认为是微尺度结构中显着的能量损失的因素，即使在室温下也是如此。因此，TED的预测在设计具有高质量因素的微机电系统（MEMS）谐振器方面非常重要。当梁和板的厚度处于微观或纳米级时，需要考虑尺寸效应。夫妻应力理论被制定为一个依赖依赖的连续性理论，以处理这些问题。在本作工作中，通过应用修改的夫妇应力理论（MCST）考虑平面应力条件和三相滞后（TPL）热量来导出TED的质量因子（Q）的分析表达。传导模型。我们考虑Kirchhoff微孔板谐振器并作为案例研究，详细讨论了长度参数对TED质量因子的影响。为了研究TED的行为，微孔板谐振器的材料被认为是硅。研究了TED作为归一化频率，微孔板厚度和长度级参数的功能的变化。还讨论了相位滞后参数对TED的影响。将本模型的结果与古典连续性理论的现有结果进行比较。本作者调查了具有较小相滞参数值的修改的夫妇应力理论可以提高微孔板谐振器的质量因子，厚度较小。

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