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首页> 外文期刊>International Journal of Heat and Mass Transfer >Modulation of the time-domain reflectance signal induced by thermal transport and acoustic waves in multilayered structure
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Modulation of the time-domain reflectance signal induced by thermal transport and acoustic waves in multilayered structure

机译：热传输和声波在多层结构中引起的时域反射信号的调制

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摘要

Structure of chip on chip and three-dimension chip of integration circuits provides promising methods to satisfy the miniaturization of integration. Such design may affect the performance of circuits considering the heat accumulation and thermal strain in devices resulted from poor thermal conductivity in small size near nanoscale. Hence, it is crucial to characterize the thermal transport and strain of multilayer structures in microanoscale. In this paper, the ultrashort pulse laser pump-probe measurement is used to study the thermal transport and induced thermal strain simultaneously with sample of 94 nm film deposited on glass substrate. Superposition theory is developed to characterize the reflectance signal by stacking the thermoreflectance variation and interference of the probe beams reflected by the interface and the coherent acoustic-phonon waves. Rigorous theoretical derivation is performed to modulate the phase and amplitude of the reflectance signal. The theoretical prediction matches well with the experimental data, and the extracted thermal conductivity of the Pt film exhibits significant size effects.
机译：集成电路的片上芯片和三维芯片的结构为满足集成的小型化提供了有希望的方法。考虑到由于纳米尺寸附近的小尺寸导热性差而导致的器件中的热量积聚和热应变，这种设计可能会影响电路的性能。因此，至关重要的是表征微米/纳米级多层结构的热传递和应变。在本文中，超短脉冲激光泵浦探针测量用于研究与沉积在玻璃基板上的94 nm膜样品同时进行的热传输和感应热应变。叠加理论的发展是通过叠加界面反射的探测光束和相干声子声波的热反射率变化和干涉来表征反射信号。执行严格的理论推导来调制反射率信号的相位和幅度。理论预测与实验数据吻合良好，Pt膜的热导率提取具有明显的尺寸效应。

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    Dong Cheng; Ma Weigang; Zhang Xing;

  • 作者单位

    Key Laboratory for Thermal Science and Power Engineering of Ministry of Education, Department of Engineering Mechanics, Tsinghua University, Beijing, China;

    Key Laboratory for Thermal Science and Power Engineering of Ministry of Education, Department of Engineering Mechanics, Tsinghua University, Beijing, China;

    Key Laboratory for Thermal Science and Power Engineering of Ministry of Education, Department of Engineering Mechanics, Tsinghua University, Beijing, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
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