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Measurement of thermophysical properties of hydrogenated amorphous carbon thin films using picosecond thermoreflectance technique

机译:使用皮秒热反射技术测量氢化非晶碳薄膜的热物理性质

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摘要

The thermophysical properties of hydrogenated amorphous carbon (a-C:H) thin films, namely the thermal diffusivity α, thermal effusivity ε, thermal conductivity κ and volumetric heat capacity C_f have been measured simultaneously using ultrafast optical pump-probe technique. The pump-probe method utilizes the film surface temperature decay following a heating pulse from a pump laser. From the temperature decay, the thermal diffusivity α and effusivity ε were obtained by curve-fittings of two different physical models. The thermal conductivity κ and volumetric heat capacity C_f were then deduced from the measured α and ε using the relations κ = α~(1/2)ε and C_f= ε/α~(1/2). The thermal conductivity and volumetric heat capacity obtained compare favorably with those reported in the literatures. The method is independent of substrate and Al capping layers. The curve-fittings are simpler because independent of parameters of the films and the Kapitza boundary thermal resistance at Al/a-C:H interface.
机译:氢化非晶碳(a-C:H)薄膜的热物理性质,即热扩散率α,热发射率ε,热导率κ和体积热容C_f已使用超快光泵探针技术同时进行了测量。泵浦探测方法利用了来自泵浦激光器的加热脉冲后的薄膜表面温度衰减。从温度衰减中,通过两个不同物理模型的曲线拟合获得热扩散率α和扩散率ε。然后使用关系式κ=α〜(1/2)ε和C_f =ε/α〜(1/2)从测得的α和ε推导导热系数κ和体积热容C_f。获得的热导率和体积热容与文献中所报道的相比具有优势。该方法独立于衬底和Al覆盖层。曲线拟合更简单,因为与膜的参数和Al / a-C:H界面处的Kapitza边界热阻无关。

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