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Study of melt convection and interface shape during sapphire crystal growth by Czochralski method

机译:用直拉法研究蓝宝石晶体生长过程中的熔体对流和界面形状

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摘要

Global simulation is performed to perdict electromagnetic field, heat transfer, melt flow, and interface shape during the different growth stages of sapphire crystal by RF-heated Czochralski (Cz) process. Melt flow in the Cz-sapphire growth system includes Marangoni convection due to the variation of surface tension at the free surface, natural convection due to the complex thermal boundary conditions on the crucible walls, and forced convection due to the crystal rotation. As the crystal grow longer, the effects of the convections on the melt flow, temperature distribution and interface shape varies due to the drop of melt, which can be characterized by Grashof number (Gr) with the melt height as the characteristic length. It is found that as melt height reduces, natural convection gets weaker, and the interface becomes flatter. To examine systematically the effects of the convections on the crystal growth process, three dimensionless parameters, N_σ, Gr/Re~2 and N_(σ2), are further introduced. N_σ denotes the influence of surface tension in the boundary layer as compared with buoyancy in the melt, Gr/Re~2 is the ratio of convective forces to the normalizing convective velocities with viscosity, and N_(σ2) represents the relative strength of Marangoni flow to forced convection. The effects of the parameters on the melt flow and heat transfer are examined, and their relationships to the interface convexities are obtained. The understanding of melt convection and interface shape is not only important for the optimization of a stable sapphire crystal growth, but also critical for an accurate modeling of the growth process.
机译:通过RF加热的切克劳斯基(Cz)工艺,对蓝宝石晶体不同生长阶段的电磁场,传热,熔体流动和界面形状进行了全局仿真。 Cz-蓝宝石生长系统中的熔体流动包括由于自由表面的表面张力变化而引起的Marangoni对流,由于坩埚壁上复杂的热边界条件而引起的自然对流以及由于晶体旋转而引起的强制对流。随着晶体生长时间的延长,对流对熔体流动,温度分布和界面形状的影响会因熔体的滴落而发生变化,这可以通过格拉斯霍夫数(Gr)来表征,熔体高度作为特征长度。发现随着熔体高度的降低,自然对流变弱,界面变平。为了系统地检查对流对晶体生长过程的影响,进一步引入了三个无量纲参数N_σ,Gr / Re〜2和N_(σ2)。 N_σ表示与熔体中的浮力相比边界层表面张力的影响,Gr / Re〜2是对流力与归一化对流速度随粘度的比值,N_(σ2)表示马兰戈尼流的相对强度强制对流。研究了参数对熔体流动和传热的影响,并获得了它们与界面凸度的关系。对熔体对流和界面形状的理解不仅对于优化稳定的蓝宝石晶体生长很重要,而且对于精确的生长过程建模也至关重要。

著录项

  • 来源
    《International Journal of Heat and Mass Transfer》 |2012年第26期|p.8003-8009|共7页
  • 作者单位

    School of Energy and Power Engineering, Huazhong University of Science and Technology (HUST), Wuhan 430074, China;

    School of Energy and Power Engineering, Huazhong University of Science and Technology (HUST), Wuhan 430074, China;

    School of Energy and Power Engineering, Huazhong University of Science and Technology (HUST), Wuhan 430074, China;

    School of Energy and Power Engineering, Huazhong University of Science and Technology (HUST), Wuhan 430074, China;

    School of Energy and Power Engineering, Huazhong University of Science and Technology (HUST), Wuhan 430074, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    melt convection; interface shape; sapphire; czochralski; simulation;

    机译:熔体对流界面形状蓝宝石;czochralski;模拟;

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