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首页> 外文期刊>International Journal of Heat and Mass Transfer >Brownian dynamics study of particles in chemical vapor deposition of aluminum nitride
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Brownian dynamics study of particles in chemical vapor deposition of aluminum nitride

机译：氮化铝化学气相沉积中颗粒的布朗动力学研究

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摘要

Aluminum nitride (A1N) films are commercially grown by chemical vapor deposition. In this process, it has been experimentally observed that A1N nanoparticles are formed in the gas-phase. Although these particles are formed in the vicinity of the hot substrate, they tend to stay away from the hot substrate and are observed to deposit on the cold walls of the reactor. In this study, the trajectories of the A1N particles are simulated with the goal to understand the mechanisms responsible for their motion. A three-dimensional (3D) Lagrangian Brownian dynamics simulator based on the Langevin equation is developed, and coupled with a 3D computational fluid dynamics (CFD) solver. The model is validated, and then explored for the problem at hand. It is found that thermophoretic forces are primarily responsible for driving the particles away from the hot substrate and depositing them on the cold reactor walls.
机译：氮化铝（AlN）薄膜通过化学气相沉积在商业上生长。在该过程中，已经通过实验观察到在气相中形成AlN纳米颗粒。尽管这些颗粒在热的基材附近形成，但是它们倾向于远离热的基材并被观察到沉积在反应器的冷壁上。在这项研究中，模拟A1N粒子的轨迹是为了了解负责其运动的机制。开发了基于Langevin方程的三维（3D）拉格朗日布朗动力学模拟器，并与3D计算流体动力学（CFD）求解器耦合。验证模型，然后针对当前问题进行探索。发现热泳力主要负责驱使颗粒离开热的基底并将它们沉积在冷的反应器壁上。

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