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首页> 外文期刊>International Journal of Knowledge-Based in Intelligent Engineering Systems >An artificial intelligence approach for the design and manufacturing of micro electro mechanical systems
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An artificial intelligence approach for the design and manufacturing of micro electro mechanical systems

机译：一种用于微机电系统设计和制造的人工智能方法

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摘要

Micro Electro Mechanical Systems (MEMS) is a new field. However, the application of MEMS has increased drastically for the past decade. The design and manufacturing of MEMS require specific expertise. A computerized consultant system for thorough static and dynamic analysis of MEMS is needed for design and manufacturing. A PC-based Expert System, EASYMEMS, has been developed. EASYMEMS contains domain specific knowledge of MEMS as well as the reasoning process of a human expert. It includes three sections: material, design, and manufacturing. It can be used to select the material for MEMS. It supports human reasoning and thus can offer MEMS design guidelines for engineers. It is also capable of performing thorough static and dynamic analysis and then calculating critical dimensions for the design of MEMS. Furthermore, it can be used for the consultation for MEMS manufacture. The computer graphics offered by EASYMEMS are very helpful for both MEMS design and manufacturing. In simple words, EASYMEMS is very user-friendly and is very beneficial for MEMS engineers.
机译：微机电系统（MEMS）是一个新领域。然而，在过去的十年中，MEMS的应用急剧增加。 MEMS的设计和制造需要特定的专业知识。设计和制造需要用于对MEMS进行彻底的静态和动态分析的计算机顾问系统。已经开发了基于PC的专家系统EASYMEMS。 EASYMEMS包含MEMS的特定领域知识以及人类专家的推理过程。它包括三个部分：材料，设计和制造。可用于选择MEMS的材料。它支持人类推理，因此可以为工程师提供MEMS设计指南。它还能够执行彻底的静态和动态分析，然后计算用于MEMS设计的关键尺寸。此外，它可用于MEMS制造的咨询。 EASYMEMS提供的计算机图形对于MEMS设计和制造都非常有帮助。简而言之，EASYMEMS非常用户友好，并且对MEMS工程师非常有益。

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