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A design-oriented experimental module for teaching micro- and nanotechnologies to mechanical engineering students

机译：一种面向设计的实验模块，用于向机械工程专业的学生教授微纳米技术

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摘要

Advances in miniaturization science have provided new opportunities in education at both the undergraduate and graduate levels. In order to effectively incorporate micro- and nanotechnologies into the existing mechanical engineering curriculum, the author developed a design-oriented experimental module for two laboratory-intensive courses. Students enrolled on these courses are involved in all the stages of the laboratory projects: design, fabrication, and measurement The experimental module emphasizes hands-on experience and is seamlessly integrated into the course structures. The students can use what they learn from the classes in the laboratory activities, which include two-dimensional photomask layout design, photolithography, isotropic and anisotropic wet etching, bulk micromachining, and thin-film and structure characterization with various measurement tools. Each laboratory activity is designed to integrate theories from textbooks with actual fabrication and characterization processes. The students gain a better understanding of the course topics by creating their own designs that meet the requirements and by fabricating their own structures that show satisfactory results. According to student surveys the experimental module is effective in teaching micro- and nanotechnologies in the mechanical engineering program. With some modification, this module can be easily extended to courses in other disciplines.
机译：微型科学的进步为本科生和研究生提供了新的教育机会。为了有效地将微技术和纳米技术整合到现有的机械工程课程中，作者为两个实验室密集课程开发了一种面向设计的实验模块。参加这些课程的学生将参与实验室项目的所有阶段：设计，制造和测量。实验模块着重实践经验，并无缝集成到课程结构中。学生可以在课堂活动中使用从课程中学到的知识，包括二维光掩模布局设计，光刻，各向同性和各向异性湿法蚀刻，体微机械加工以及使用各种测量工具进行的薄膜和结构表征。每个实验室活动都旨在将教科书中的理论与实际制造和表征过程相结合。通过创建符合要求的自己的设计以及制造出令人满意的结果的结构，学生可以更好地理解课程主题。根据学生的调查，实验模块可有效地教授机械工程课程中的微米和纳米技术。通过一些修改，该模块可以轻松扩展到其他学科的课程。

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