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首页> 外文期刊>International Journal of Microwave and Wireless Technologies >The low-complexity RF MEMS switch at EADS: an overview
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The low-complexity RF MEMS switch at EADS: an overview

机译：EADS的低复杂度RF MEMS开关：概述

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摘要

This paper gives an overview of the low-complexity radio frequency microelectromechanical systems (RF MEMS) switch concept and technology of EADS Innovation Works in Germany. Starting in 2003, a capacitive switch concept, which is unique in several aspects, was developed to address specific needs in the aeronautic and space. Thermally grown silicon oxide as dielectric layer, the silicon substrate as actuation electrode, and a conductive zone realized by ion implantation make the EADS RF MEMS switch a very simple, low-cost, and reliable approach. In this document, data on experimental investigations are presented, which demonstrate outstanding performance figures in terms of insertion loss, isolation, frequency range, bandwidth, RF-power handling, and robustness with respect to thermal load. Based on this concept, numerous different circuits in particular single-pole single-throws (SPSTs), single-pole multi-throws (SPMTs), tunable filters, phase shifters, and electronically steerable antennas between 6 and 100 GHz have been designed, fabricated, and characterized.
机译：本文概述了德国EADS创新工厂的低复杂度射频微机电系统（RF MEMS）开关概念和技术。从2003年开始，开发了一种在多个方面都独一无二的电容式开关概念，以满足航空和航天领域的特定需求。热生长的氧化硅作为介电层，硅基板作为激励电极以及通过离子注入实现的导电区，使EADS RF MEMS开关成为一种非常简单，低成本且可靠的方法。在本文档中，提供了有关实验研究的数据，这些数据在插入损耗，隔离度，频率范围，带宽，RF功率处理以及相对于热负载的稳健性方面均表现出出色的性能。基于这一概念，已经设计，制造了许多不同的电路，特别是单刀单掷（SPST），单刀多掷（SPMT），可调滤波器，移相器和电子可控天线。 ，并具有特征。

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