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首页> 外文期刊>International Journal of Microwave and Wireless Technologies >A 20 GHz microwave heater for digital microfluidic
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A 20 GHz microwave heater for digital microfluidic

机译:用于数字微流体的20 GHz微波加热器

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This paper reports on a microwave heater at 20 GHz for digital microfluidics. It allows rapid heating of nanoliter fluid samples and simultaneous temperature monitoring by correlating the reflection coefficient of the heater with the temperature dependency of the relative permittivity of the lossy fluid under consideration, in this case demineralized water. Microwave heating was performed with power levels of 20 and 23 dBm at the on-wafer probe tips on samples of 500 nL. Temperature measurements were carried out with a miniaturized type K thermocouple, and a platinum resistor to monitor the reference temperature. Microwave and thermal performances have been characterized using multi-physics software, and measurements obtained with a large signal vector network analyzer showed good agreement with simulated data. An average heating rate of 20 degrees C/s was observed during the first 4 s of the heating process.
机译:本文报道了用于数字微流体的20 GHz微波加热器。通过将加热器的反射系数与所考虑的有损耗流体(在这种情况下为软化水)的相对介电常数的温度依赖性相关联,可以快速加热纳升流体样品并同时进行温度监控。在500 nL样品上的晶圆上探针尖端以20和23 dBm的功率水平进行微波加热。用小型K型热电偶和一个铂电阻监测温度以进行温度测量。微波和热性能已使用多物理场软件进行了表征,并且使用大型信号矢量网络分析仪获得的测量结果与模拟数据具有很好的一致性。在加热过程的前4 s中观察到20℃/ s的平均加热速率。

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