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Study on the all-coefficient adaptive sequential decoupling control

机译:全系数自适应顺序解耦控制研究

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Multi-zone space crystal furnace is the key equipment to produce excellent crystal materials. But it is difficult to implement the decoupling control among multi-zone due to the constraints in transient power dissipation and working time. In this paper, according to the working modes of the multi-zone space crystal furnace in China, an all-coefficient adaptive sequential decoupling control method is proposed, which combines the all-coefficient adaptive theory with the idea of sequential decoupling. There is no need to design performance index function and solve complex Diophantine equation in this method. Furthermore, this approach has the character of strong robustness. Finally, an example of a two zones space crystal furnace is provided and an all-coefficient adaptive sequential decoupling control system is designed to simulate the running process based on the working mode in our country. The simulation results show that the proposed method is effective and suitable for more zones crystal furnace.
机译:多区空间晶体炉是生产优质晶体材料的关键设备。但是由于瞬态功耗和工作时间的限制,很难在多区域之间实现去耦控制。本文根据我国多区域空间晶体炉的工作方式,提出了一种全系数自适应顺序解耦控制方法,将全系数自适应理论与顺序解耦思想相结合。该方法无需设计性能指标函数和求解复杂的Diophantine方程。此外,这种方法具有强大的鲁棒性。最后,给出了一个两区空间晶体炉的实例,设计了一种全系数自适应顺序解耦控制系统,根据我国的工作模式对运行过程进行了仿真。仿真结果表明,该方法是有效的,适用于更多区域的结晶炉。

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