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首页> 外文期刊>International Journal of Production Research >One-dimensional-based automatic defect inspection of multiple patterned TFT-LCD panels using Fourier image reconstruction
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One-dimensional-based automatic defect inspection of multiple patterned TFT-LCD panels using Fourier image reconstruction

机译：基于傅立叶图像重建的多图案TFT-LCD面板基于一维的自动缺陷检查

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摘要

Thin film transistor-liquid crystal display (TFT-LCD) has been used in a wide range of electronic devices. For large-sized and high-density TFT-LCD panel inspection, a high-resolution line scan is demanded. A TFT-LCD panel image at a fine resolution presents very complicated patterns with less regularity. The paper proposes a non-referential defect detection scheme that directly works on the one-dimensional (1D) line images using the Fourier image reconstruction. The 1D grey-level line image is first divided into small segments, each of the length of the repeated period for a given TFT-LCD panel. The divided segments are then combined as a two-dimensional (2D) image. The frequency components corresponding to the 1D background pattern can be easily identified in the 2D Fourier spectrum. By eliminating the frequency components in the 2D Fourier spectrum that represent the periodic structural pattern of the combined 2D image and then back-transforming the image using the inverse Fourier transform, the 2D Fourier reconstruction process can effectively remove the complicated background pattern and well preserve local anomalies. Experimental results on a number of micro-defects embedded in different patterned regions of TFT-LCD panels show that the proposed method can reliably detect various ill-defined defects.
机译：薄膜晶体管液晶显示器（TFT-LCD）已被广泛用于电子设备中。对于大型和高密度TFT-LCD面板检查，需要高分辨率的行扫描。高分辨率的TFT-LCD面板图像显示的图案非常复杂，规则性较低。本文提出了一种非参考缺陷检测方案，该方案可以使用傅立叶图像重建直接对一维（1D）线图像进行处理。首先将1D灰度线图像分成小段，对于给定的TFT-LCD面板，每个段的重复周期的长度。然后将分割的片段组合为二维（2D）图像。可以在2D傅立叶频谱中轻松识别与1D背景图案相对应的频率分量。通过消除2D傅立叶频谱中代表组合2D图像的周期性结构模式的频率分量，然后使用傅立叶逆变换对图像进行反变换，二维傅立叶重构过程可以有效地去除复杂的背景图案并很好地保留局部异常。对嵌入在TFT-LCD面板的不同图案区域中的许多微缺陷的实验结果表明，该方法可以可靠地检测各种不明确的缺陷。

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