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A Nonparametric Scheme for Monitoring a Process Output with a Block Effect

机译:用于监视具有块效应的过程输出的非参数方案

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This paper proposes a distribution-free (or nonparametric) control scheme to monitor a process output that contains two special causes of variation called "block or batch" effects and "treatment or position" effects. The scheme properties (control limits, false alarm rate, and in-control average run length) stay the same under any assumed continuous probability distribution. For moderate sample sizes, these properties can be computed exactly from available tables without the need to estimate the mean or variance of the process. The proposed monitoring scheme requires ranking the observations within blocks and using the method of analysis of means by ranks. The paper includes an illustrative example concerning the grinding process of silicon wafers used in integrated circuits production.
机译:本文提出了一种无分布(或非参数)控制方案来监视过程输出,该过程包含两个导致变量变化的特殊原因,称为“块或批”效应和“处理或位置”效应。在任何假定的连续概率分布下,方案属性(控制限制,错误警报率和控制中平均运行时间)保持不变。对于适中的样本量,可以从可用表中精确计算这些属性,而无需估计过程的均值或方差。拟议的监测方案要求在区块内对观测结果进行排名,并使用按等级分析均值的方法。本文包括一个有关集成电路生产中使用的硅片研磨工艺的说明性示例。

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