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Model description and parameter extraction of on-chip spiral inductors for MMICs

机译:MMIC片上螺旋电感器的模型描述和参数提取

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摘要

A statistical description of the global performance of on-chip spiral inductors, based on extensive measurement is presented. These inductors were fabricated with different turn numbers or track lengths/track widths, but with the same spacing. From the S parameters measured using a de-embedding technique, the inductance L, Q factor, self-resonance frequency, and figure-of-merit indicator (FMI) of these inductors are determined. Various local scalable formulas are obtained in order to describe the features of these inductors. Based on extensive parametric studies, certain ways to improve these inductor performances can be found.
机译:提出了基于广泛测量的片上螺旋电感器整体性能的统计描述。这些电感器的匝数或走线长度/走线宽度不同,但间距相同。根据使用去嵌入技术测得的S参数,可以确定这些电感器的电感L,Q因子,自谐振频率和品质因数指示器(FMI)。为了描述这些电感器的特性,获得了各种局部可扩展公式。基于大量的参数研究,可以找到改善这些电感器性能的某些方法。

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