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首页> 外文期刊>ISIJ international >Enhancement of the Wear and Corrosion Resistance of DLC/oxynitriding Duplex-treated PM30 Steel by the Asymmetric Bipolar-pulsed Plasma Enhanced CVD
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Enhancement of the Wear and Corrosion Resistance of DLC/oxynitriding Duplex-treated PM30 Steel by the Asymmetric Bipolar-pulsed Plasma Enhanced CVD

机译：非对称双极脉冲等离子体增强CVD增强DLC /氧氮化双相处理的PM30钢的耐磨性和耐腐蚀性

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摘要

In the present research, DLC films are produced by asymmetric bipolar pulsed plasma enhanced CVD after preparing oxynitride-treated PM30 steel. The experimental parameters include various CH4 gas flows (3, 7, 11, 15 and 19 scem) with asymmetric bipolar pulsed voltages (- 15 + 10%) and a deposition time of 90 min, respectively. In order to evaluate the properties of the DLC films for oxynitride-treated PM30 steel, Raman spectroscopy analysis, adhesion tests, nano-indentation, wear tests, and corrosion resistance inspections were performed. The experimental results reveal that the DLC/oxynitride duplex coating layers have better properties when the DLC films are treated with an appropriate CH_4 gas flow (15 seem). Meanwhile, the coatings possess the highest hardness and elastic modulus (5.91 and 89.87 GPa, respectively), the lowest wear loss volume (for axial loads of 2 and 5 N of 3.82 × 10~(-3) and 5.49 × 10~(-3) mm~3, respectively), the lowest corrosion current (1.43 × 10~(-4) A-cm~(-2)), and the highest polarization resistance (5.32 × 10~2 Ω-cm~2) after a 3.5 mass% NaCI corrosion test. This study also confirms that the wear and corrosion resistance of DLC/oxynitride duplex-treated PM30 steel can be effectively improved via asymmetric bipolar pulsed plasma enhanced CVD.
机译：在本研究中，DLC膜是在制备经过氧氮化处理的PM30钢之后，通过不对称双极脉冲等离子体增强CVD制备的。实验参数包括各种CH4气流（3、7、11、15和19 scem），分别具有不对称的双极脉冲电压（-15 + 10％）和90分钟的沉积时间。为了评估用于氮氧化物处理的PM30钢的DLC膜的性能，进行了拉曼光谱分析，附着力测试，纳米压痕，磨损测试和耐腐蚀检查。实验结果表明，当用合适的CH_4气流（15sccm）处理DLC膜时，DLC /氮氧化物双涂层具有更好的性能。同时，该涂层具有最高的硬度和弹性模量（分别为5.91和89.87 GPa），最低的磨损损耗量（2和5 N的轴向载荷分别为3.82×10〜（-3）和5.49×10〜（- 3）分别之后，最低腐蚀电流（1.43×10〜（-4）A-cm〜（-2））和最高极化电阻（5.32×10〜2Ω-cm〜2） 3.5质量％NaCl腐蚀测试。这项研究还证实，通过不对称双极脉冲等离子体增强CVD可以有效改善DLC /氮氧化物双相处理的PM30钢的耐磨性和耐腐蚀性。

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  • 来源
    《ISIJ international》 |2018年第8期|1510-1518|共9页
  • 作者

    Shih-Hsien CHANG; Chang-Kai PENG; Kuo-Tsung HUANG; Chung-Ming LIU;

  • 作者单位

    Department of Materials and Mineral Resources Engineering, National Taipei University of Technology, Taipei, 10608 Taiwan, ROC;

    Department of Materials and Mineral Resources Engineering, National Taipei University of Technology, Taipei, 10608 Taiwan, ROC;

    Department of Auto-Mechanics, National Kangshan Agricultural Industrial Senior High School, Kaohsiung, 82049 Taiwan, ROC;

    School of Dentistry, China Medical University, Taichung City, 40402 Taiwan, ROC,Biomedical Technology R&D Center, China Medical University Hospital, Taichung City, 40402 Taiwan, ROC;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    DLC; asymmetric bipolar-pulsed plasma enhanced CVD; oxynitriding; PM30 steel; wear; corrosion resistance;

    机译：DLC;不对称双极脉冲等离子体增强CVD;氧氮化PM30钢;穿;耐腐蚀性能;

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