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首页> 外文期刊>Japanese journal of applied physics >High-coupling leaky surface acoustic waves on LiNbO3 or LiTaO3 thin plate bonded to high-velocity substrate
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High-coupling leaky surface acoustic waves on LiNbO3 or LiTaO3 thin plate bonded to high-velocity substrate

机译:粘结在高速基板上的LiNbO3或LiTaO3薄板上的高耦合泄漏表面声波

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摘要

The propagation properties of leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) on a LiNbO3 (LN) or LiTaO3 (LT) thin plate bonded to an AT-cut quartz or c-plane sapphire (c-Al2O3) substrate with a high phase velocity were investigated. It was theoretically revealed that when the LN or LT thin-plate thickness is less than one wavelength, the particle displacement of LLSAWs was concentrated in the thin plate and the electromechanical coupling factor (K-2) was increased to two to three times that in the single substrate. Furthermore, for 36 degrees Y-cut X-propagating LT/c-Al2O3 with an LT thin-plate thickness of 0.35 lambda and X-cut 36 degrees Y-propagating LN/c-Al2O3 with an LN thin-plate thickness of 0.19 lambda, the values of K-2 for an LSAW and an LLSAW were experimentally found to increase from 5.6 and 10.4% in the single substrate to 11.5 and 19.7% in the thin-plate bonded structure, respectively. (C) 2017 The Japan Society of Applied Physics
机译:泄漏表面声波(LSAW)和纵向型LSAW(LLSAW)在粘结到AT切割石英或c面蓝宝石(c-Al2O3)衬底的LiNbO3(LN)或LiTaO3(LT)薄板上的传播特性对具有高相速度的材料进行了研究。从理论上讲,当LN或LT薄板厚度小于一个波长时,LLSAWs的颗粒位移集中在薄板上,并且机电耦合系数(K-2)增大到2-3倍。单一基材。此外,对于36度的LT薄板厚度为0.35λ的Y切面X传播的LT / c-Al2O3和LN的薄板厚度为0.19λ的X切面的Y方向传播的LN / c-Al2O3 ,通过实验发现,LSAW和LLSAW的K-2值分别从单个基板的5.6%和10.4%增至薄板键合结构的11.5和19.7%。 (C)2017日本应用物理学会

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  • 来源
    《Japanese journal of applied physics》 |2017年第7s1期|07JD13.1-07JD13.7|共7页
  • 作者单位

    Univ Yamanashi, Interdisciplinary Grad Sch Med & Engn, Kofu, Yamanashi 4008511, Japan;

    Univ Yamanashi, Interdisciplinary Grad Sch Med & Engn, Kofu, Yamanashi 4008511, Japan;

    Univ Yamanashi, Interdisciplinary Grad Sch Med & Engn, Kofu, Yamanashi 4008511, Japan;

    Univ Yamanashi, Interdisciplinary Grad Sch Med & Engn, Kofu, Yamanashi 4008511, Japan;

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