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首页> 外文期刊>Japanese journal of applied physics >Optical constants of off-stoichiometric aluminum oxide thin film in 6-20nm soft-X-ray/extreme ultraviolet region
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Optical constants of off-stoichiometric aluminum oxide thin film in 6-20nm soft-X-ray/extreme ultraviolet region

机译：非化学计量的氧化铝薄膜在6-20nm软X射线/极紫外区域的光学常数

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摘要

In this study, the optical constants of a sputter-deposited aluminum oxide thin film are measured in the soft-X-ray wavelength region of 6-20nm using an angle-dependent X-ray reflectivity technique at the Indus-1 synchrotron radiation source. The chemical composition of the aluminum oxide thin film is analyzed by an X-ray photoelectron spectroscopy technique. Grazing incidence X-ray reflectivity results indicate that the density of the film is lower (2.93 g.cm(-3)) than that of bulk alumina (3.97 g.cm(-3)). The experimentally obtained optical constants correlate with the film composition and density. It is found that the experimentally measured delta and beta values are 5-33% higher than the tabulated values except those near the Al L edge (17 nm) region, where the experimentally obtained beta values are 7-20% lower and the delta values are 50-120% higher. This large mismatch observed between the experimental values and Henke et al. data is attributed to the reduced film density and the presence of a mixed phase of AlOx and Al2O3, as evidenced by X-ray photoelectron spectroscopy. (C) 2016 The Japan Society of Applied Physics
机译：在这项研究中，使用Indus-1同步加速器辐射源的角度相关X射线反射率技术，在6-20nm的软X射线波长范围内测量了溅射沉积的氧化铝薄膜的光学常数。通过X射线光电子能谱技术分析氧化铝薄膜的化学组成。掠入射X射线反射率结果表明，该薄膜的密度（2.93 g.cm（-3））低于散装氧化铝（3.97 g.cm（-3））。实验获得的光学常数与膜的组成和密度相关。发现除了在Al L边缘（17 nm）区域附近的实验值之外，实验测量的delta和beta值比列表值高5-33％，其中在实验中获得的beta值低7-20％，delta值高出50-120％。实验值和Henke等人之间​​观察到这种较大的不匹配。 X射线光电子能谱表明，数据归因于降低的膜密度以及AlOx和Al2O3混合相的存在。 （C）2016年日本应用物理学会

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  • 来源
    《Japanese journal of applied physics》 |2016年第10期|101101.1-101101.5|共5页
  • 作者

    Sinha Mangalika; Sharma Saurabh; Singh Amol; Modi Mohammed H.;

  • 作者单位

    Raja Ramanna Ctr Adv Technol, Indus Synchrotrons Utilizat Div, Indore 452013, Madhya Pradesh, India|Raja Ramanna Ctr Adv Technol, Homi Bhabha Natl Inst, Indore 452013, Madhya Pradesh, India;

    Raja Ramanna Ctr Adv Technol, Indus Synchrotrons Utilizat Div, Indore 452013, Madhya Pradesh, India;

    Raja Ramanna Ctr Adv Technol, Indus Synchrotrons Utilizat Div, Indore 452013, Madhya Pradesh, India;

    Raja Ramanna Ctr Adv Technol, Indus Synchrotrons Utilizat Div, Indore 452013, Madhya Pradesh, India|Raja Ramanna Ctr Adv Technol, Homi Bhabha Natl Inst, Indore 452013, Madhya Pradesh, India;

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