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首页> 外文期刊>Japanese journal of applied physics >Fundamentals of planar-type inductively coupled thermal plasmas on a substrate for large-area material processing
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Fundamentals of planar-type inductively coupled thermal plasmas on a substrate for large-area material processing

机译：用于大面积材料处理的基板上的平面型电感耦合热等离子体的基本原理

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In this work, the fundamentals of planar-type Ar inductively coupled thermal plasmas (ICTPs) with oxygen molecular gas on a substrate have been studied. Previously, aiming at large-area material processing, we developed a planar-type ICTP torch with a rectangular quartz vessel instead of a conventional cylindrical tube. For the adoption of such planar-type ICTP to material processing, it is necessary to sustain the ICTP with molecular gases on a substrate stably and uniformly. To determine the uniformity of the ICTP formed on the substrate, spectroscopic observation was carried out at 3mm above the substrate. Results showed that the radiation intensities of specified O atomic lines were almost uniformly detected along the surface of the substrate. This means that excited O atoms, which are important radicals for thermal plasma oxidation, are present in the planar-type ICTP uniformly on the substrate. (C) 2016 The Japan Society of Applied Physics
机译：在这项工作中，已经研究了在基板上带有氧分子气体的平面型Ar感应耦合热等离子体（ICTP）的基本原理。以前，针对大面积材料加工，我们开发了带有矩形石英容器的平面型ICTP炬管，而不是传统的圆柱形管。为了将这种平面型ICTP用于材料处理，必须在基板上稳定且均匀地维持具有分子气体的ICTP。为了确定在基板上形成的ICTP的均匀性，在基板上方3mm处进行了光谱观察。结果表明，沿着衬底表面几乎均匀地检测到指定的O原子线的辐射强度。这意味着作为热等离子体氧化的重要自由基的被激发的O原子均匀地存在于基板上的平面型ICTP中。 （C）2016年日本应用物理学会

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  • 来源
    《Japanese journal of applied physics》 |2016年第7s2期|07LB03.1-07LB03.7|共7页
  • 作者

    Tial Mai Kai Suan; Irie Hiromitsu; Maruyama Yuji; Tanaka Yasunori; Uesugi Yoshihiko; Ishijima Tatsuo;

  • 作者单位

    Kanazawa Univ, Fac Elect & Comp Engn, Kanazawa, Ishikawa 9201192, Japan;

    Kanazawa Univ, Fac Elect & Comp Engn, Kanazawa, Ishikawa 9201192, Japan;

    Kanazawa Univ, Fac Elect & Comp Engn, Kanazawa, Ishikawa 9201192, Japan;

    Kanazawa Univ, Fac Elect & Comp Engn, Kanazawa, Ishikawa 9201192, Japan|Kanazawa Univ, Res Ctr Sustainable Energy & Technol, Kanazawa, Ishikawa 9201192, Japan;

    Kanazawa Univ, Fac Elect & Comp Engn, Kanazawa, Ishikawa 9201192, Japan|Kanazawa Univ, Res Ctr Sustainable Energy & Technol, Kanazawa, Ishikawa 9201192, Japan;

    Kanazawa Univ, Res Ctr Sustainable Energy & Technol, Kanazawa, Ishikawa 9201192, Japan;

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