Design of apodized hydrogenated amorphous silicon grating couplers with metal mirrors for inter-layer signal coupling: Toward three-dimensional optical interconnection

Kuno Yuki; Kang JoonHyun; Hayashi Yusuke; Suzuki Junichi; Amemiya Tomohiro; Nishiyama Nobuhiko; Arai Shigehisa

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Design of apodized hydrogenated amorphous silicon grating couplers with metal mirrors for inter-layer signal coupling: Toward three-dimensional optical interconnection

机译：用于层间信号耦合的带金属镜的变迹氢化非晶硅光栅耦合器的设计：面向三维光学互连

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A pair of grating couplers with apodized structure, sandwiched by metal mirrors, was proposed for inter-layer coupling between multilayer waveguides based on hydrogenated amorphous silicon (a-Si:H). We proved theoretically that the introduction of an apodized grating coupler yields a high coupling efficiency of about 90% even for an inter-layer distance of several micrometers. In addition, this high coupling efficiency was obtained for a large bandwidth by adjusting the grating period. (C) 2015 The Japan Society of Applied Physics

机译：提出了一对具有变迹结构的光栅耦合器，夹在金属镜之间，用于基于氢化非晶硅（a-Si：H）的多层波导之间的层间耦合。我们从理论上证明，即使对于几微米的层间距离，切趾光栅耦合器的引入也能产生约90％的高耦合效率。另外，通过调整光栅周期，可以在较大带宽下获得这种高耦合效率。（C）2015年日本应用物理学会

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《Japanese journal of applied physics》 |2015年第4s期|04DG04.1-04DG04.6|共6页
作者
Kuno Yuki; Kang JoonHyun; Hayashi Yusuke; Suzuki Junichi; Amemiya Tomohiro; Nishiyama Nobuhiko; Arai Shigehisa;
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Tokyo Inst Technol, Dept Elect & Elect Engn, Meguro Ku, Tokyo 1528550, Japan.;

Tokyo Inst Technol, Dept Elect & Elect Engn, Meguro Ku, Tokyo 1528550, Japan.;

Tokyo Inst Technol, Dept Elect & Elect Engn, Meguro Ku, Tokyo 1528550, Japan.;

Tokyo Inst Technol, Dept Elect & Elect Engn, Meguro Ku, Tokyo 1528550, Japan.;

Tokyo Inst Technol, Quantum Nanoelect Res Ctr, Meguro Ku, Tokyo 1528552, Japan.;

Tokyo Inst Technol, Dept Elect & Elect Engn, Meguro Ku, Tokyo 1528550, Japan.;

Tokyo Inst Technol, Quantum Nanoelect Res Ctr, Meguro Ku, Tokyo 1528552, Japan.;

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1. Layer-to-Layer Grating Coupler Based on Hydrogenated Amorphous Silicon for Three-Dimensional Optical Circuits [J] . Joonhyun Kang, Yuki Atsumi, Manabu Oda, Japanese journal of applied physics . 2012,第12期

机译：三维光学电路中基于氢化非晶硅的层对层光栅耦合器
2. 50 Gbps data transmission through amorphous silicon interlayer grating couplers with metal mirrors [J] . Joon Hyun Kang, Yuki Atsumi, Yusuke Hayashi, _Applied Physics Express . 2014,第3期

机译：通过带有金属镜的非晶硅夹层光栅耦合器进行50 Gbps数据传输
3. On-chip intra- and inter-layer grating couplers for three-dimensional integration of silicon photonics [J] . Zhang Yang, Kwong David, Xu Xiaochuan, Applied Physics Letters . 2013,第21期

机译：片上层间和层间光栅耦合器，用于硅光子的三维集成
4. Apodized amorphous silicon grating coupler with metal mirrors for 3D optical interconnection [C] . Yuki Kuno, JoonHyun Kang, Kazuto Itoh, Conference on Lasers and Electro-Optics Pacific Rim . 2015

机译：带有金属镜的切趾非晶硅光栅耦合器，用于3D光学互连
5. Silicon grating couplers for low loss coupling between optical fiber and silicon nanowires [D] . Wirth, Justin C. 2011

机译：硅光栅耦合器，用于光纤和硅纳米线之间的低损耗耦合
6. All Dielectric Transmissive Structural Multicolor Pixel Incorporating a Resonant Grating in Hydrogenated Amorphous Silicon [O] . Ishwor Koirala, Vivek Raj Shrestha, Chul-Soon Park, -1

机译：在氢化非晶硅中结合谐振光栅的所有介电透射结构多色像素。
7. Ultra-low coupling loss fully-etched apodized grating coupler with bonded metal mirror [O] . Ding, Yunhong, Peucheret, Christophe, Ou, Haiyan 2014

机译：结合金属镜的超低耦合损耗全蚀刻变迹光栅耦合器

Design of apodized hydrogenated amorphous silicon grating couplers with metal mirrors for inter-layer signal coupling: Toward three-dimensional optical interconnection

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