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首页> 外文期刊>Japanese journal of applied physics >Characteristics of Electron Conduction in a Gas under a Quadrupole Magnetic Field and Radio-Frequency Electric Fields
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Characteristics of Electron Conduction in a Gas under a Quadrupole Magnetic Field and Radio-Frequency Electric Fields

机译：四极磁场和射频电场下气体中电子的传导特性

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摘要

Electron conduction in CF_4 under a simplified model quadrupole magnetic field (QMF) and rf electric fields at f = 13.56, 27.12, and 40.68 MHz was analyzed using a Monte Carlo method, following the manner of electron swarm analyses. This field configuration simulated current paths of magnetic neutral loop discharge plasmas used for dry etching. The electron conduction therein was focused on as an elemental process of plasma power deposition. The electrons formed a star-shaped distribution with four rays along the separatrices of the QMF. The effective electron conductivity quantified as the amplitude of mean electron velocity was high around the central axis. The time-averaged mean electron velocities in the four regions of the QMF were biased under a rectification effect of the magnetic field. With increasing f, the high-conductivity region expanded and ionization was promoted. An enhancement of plasma power deposition under high driving frequencies was indicated.
机译：遵循电子群分析的方法，使用蒙特卡洛方法分析了在简化模型四极磁场（QMF）和ff分别为13.56、27.12和40.68 MHz的rf电场下CF_4中的电子传导。该场配置模拟了用于干法刻蚀的磁性中性回路放电等离子体的电流路径。其中的电子传导被集中作为等离子体功率沉积的基本过程。电子沿着QMF的分离线形成了具有四束射线的星形分布。有效电子电导率量化为平均电子速度的幅度在中心轴附近较高。在磁场的整流作用下，QMF四个区域中的时间平均电子速度出现偏差。随着f的增加，高电导率区域扩大并促进了电离。表明在高驱动频率下等离子体功率沉积的增强。

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  • 来源
    《Japanese journal of applied physics》 |2013年第5issue1期|056101.1-056101.5|共5页
  • 作者

    Hirotake Sugawara;

  • 作者单位

    Graduate School of Information Science and Technology, Hokkaido University, Sapporo 060-0814, Japan;

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  • 正文语种 eng
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