...
首页> 外文期刊>Japanese journal of applied physics >Roll-to-Roll Microimprinting Process for Indium Tin Oxide Layer Patterning
【24h】

Roll-to-Roll Microimprinting Process for Indium Tin Oxide Layer Patterning

机译:卷对卷微压印工艺用于氧化铟锡层的构图

获取原文
获取原文并翻译 | 示例
           

摘要

Conventional indium tin oxide (ITO) layer patterning processes are problematic because they have limited efficiency. Many applications demand large-area, continuous processing with low costs and a high throughput. In order to overcome these problems, a continuous roll-to-roll (R2R) microimprinting process is proposed and demonstrated for the purpose of ITO layer patterning. Additionally, a series of experiments were conducted to investigate the influence of process parameters, i.e., the operating speed, the nip pressure and the tension of substrate, and the geometry, i.e., the width and height of the master patterns, on the imprinted patterns of ITO-coated polyethylene terephthalate substrates. The proper imprinting conditions are investigated and the mechanism of ITO patterning by imprinting process was suggested. It was found that the ITO-coated area can be electrically isolated through the imprinting process, by the accumulation of microcracks on ITO induced by the deformation.
机译:常规的铟锡氧化物(ITO)层构图工艺存在问题,因为它们的效率有限。许多应用需要低成本,高吞吐量的大面积,连续处理。为了克服这些问题,提出并证明了用于ITO层图案化的连续卷对卷(R2R)微压印工艺。另外,进行了一系列实验以研究工艺参数(即操作速度,压区压力和基材的张力)以及几何形状(即主图案的宽度和高度)对压印图案的影响。 ITO涂层的聚对苯二甲酸乙二酯基材。研究了合适的压印条件,并提出了通过压印工艺进行ITO构图的机理。已经发现,通过变形过程引起的在ITO上的微裂纹的累积,可以通过压印过程将ITO涂覆的区域电隔离。

著录项

  • 来源
    《Japanese journal of applied physics》 |2013年第5issue2期|05DB09.1-05DB09.6|共6页
  • 作者单位

    Department of Mechanical Design and Production Engineering, Konkuk University, Seoul 143-701, Korea ,KU-VTT Joint Research Centre, Konkuk University, Seoul 143-701, Korea;

    Department of Mechanical Design and Production Engineering, Konkuk University, Seoul 143-701, Korea ,KU-VTT Joint Research Centre, Konkuk University, Seoul 143-701, Korea;

    Department of Mechanical Design and Production Engineering, Konkuk University, Seoul 143-701, Korea ,KU-VTT Joint Research Centre, Konkuk University, Seoul 143-701, Korea;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号