Discovery during Hydrogen Annealing:Formation of Nanoscale Fluorocarbon Tubular Structures

Xiuchun Hao; Sinya Tanaka; Atsuhiko Masuda; Kazusuke Maenaka; Kohei Higuchi

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Discovery during Hydrogen Annealing:Formation of Nanoscale Fluorocarbon Tubular Structures

机译：氢退火过程中的发现：纳米碳氟管结构的形成

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A novel fabrication method for nanoscale tubular structures is presented in this paper. The tubular structures can be obtained by heating single-crystal silicon trenches or pillars formed by the inductively coupled plasma reactive-ion etching (ICP-RIE) Bosch process in hydrogen ambient. The importance of initial vacuum in the reaction chamber for tube formation and the tube formation mechanism were discussed. The components and sidewall size of the tubular structure were also studied to verify that the tube is made of the fluorocarbon (CF) passivation layer deposited by the Bosch process. The CF tubular structure would be a promising structure for BioMEMS.

机译：本文提出了一种新型的纳米级管状结构的制备方法。可以通过在氢气环境中加热通过感应耦合等离子体反应离子刻蚀（ICP-RIE）Bosch工艺形成的单晶硅沟槽或柱子来获得管状结构。讨论了反应室中初始真空对于管形成的重要性以及管形成机理。还研究了管状结构的组件和侧壁尺寸，以验证该管是由通过Bosch工艺沉积的碳氟化合物（CF）钝化层制成的。 CF管状结构对于生物MEMS将是有希望的结构。

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《Japanese journal of applied physics》 |2013年第9issue1期|096501.1-096501.5|共5页
作者
Xiuchun Hao; Sinya Tanaka; Atsuhiko Masuda; Kazusuke Maenaka; Kohei Higuchi;
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Maenaka Human-Sensing Fusion Project, JST, Himeji, Hyogo 671-2280, Japan;

Department of Electrical Engineering and Computer Science, University of Hyogo, Himeji, Hyogo 671-2280, Japan;

Maenaka Human-Sensing Fusion Project, JST, Himeji, Hyogo 671-2280, Japan;

Department of Electrical Engineering and Computer Science, University of Hyogo, Himeji, Hyogo 671-2280, Japan;

Maenaka Human-Sensing Fusion Project, JST, Himeji, Hyogo 671-2280, Japan;

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Discovery during Hydrogen Annealing:Formation of Nanoscale Fluorocarbon Tubular Structures

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