Low Temperature Plasma Enhanced Chemical Vapor Deposition-Synthesized Electrochromic MoO_xC_y Thin Films for Flexible Electrochromic Devices

Yung-Sen Lin; Jhen-Yi Lai

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Low Temperature Plasma Enhanced Chemical Vapor Deposition-Synthesized Electrochromic MoO_xC_y Thin Films for Flexible Electrochromic Devices

机译：用于柔性电致变色器件的低温等离子体增强化学气相沉积合成电致变色MoO_xC_y薄膜

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An investigation is conducted into the electrochromic organomolybdenum oxide (MoO_xC_y) films synthesized onto 60 Ω/□ flexible poly(ethylene terephthalate) (PET)/indium tin oxide (ITO) substrates using low temperature (～23℃) plasma-enhanced chemical vapor deposition (PECVD). The PECVD-synthesized MoO_xC_y films are proven to offer remarkable electrochromic performance. Cyclic voltammetry switching measurements reveal that only low driving voltages from -1 to 1 V are needed to provide reversible Li~+ ion intercalation and de-intercalation in a 1 M LiCIO_4-vpropylene carbonate (PC) electrolyte. Light modulation with transmittance variation of up to 65.2%, optical density change of 0.63 and coloration efficiency of 35cm~2/C are achieved at a wavelength of 608 nm for 150 cycles of Li~+ intercalation and de-intercalation. PECVD-synthesized MoO_xC_y thin films show excellent electrochromic properties for applications in flexible electrochromic devices.

机译：使用低温（〜23℃）等离子增强化学气相沉积技术研究了在60Ω/□柔性聚对苯二甲酸乙二醇酯（PET）/氧化铟锡（ITO）衬底上合成的电致变色有机钼氧化物（MoO_xC_y）膜（PECVD）。经实践证明，PECVD合成的MoO_xC_y膜具有出色的电致变色性能。循环伏安法开关测量表明，仅需要-1至1 V的低驱动电压即可在1 M LiCIO_4-v-碳酸丙烯酯（PC）电解质中提供可逆的Li〜+离子嵌入和脱嵌。在Li〜+嵌入和脱嵌的150个循环中，在608 nm的波长下实现了透射率变化高达65.2％，光密度变化为0.63和着色效率为35cm〜2 / C的光调制。 PECVD合成的MoO_xC_y薄膜具有出色的电致变色性能，可用于柔性电致变色器件。

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《Japanese journal of applied physics》 |2012年第1issue2期|p.01AC03.1-01AC03.5|共5页
作者
Yung-Sen Lin; Jhen-Yi Lai;
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Department of Chemical Engineering, Feng Chia University, Taichung, Taiwan 407, Republic of China;

Department of Chemical Engineering, Feng Chia University, Taichung, Taiwan 407, Republic of China;

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1. Effects of oxygen addition on electrochromic properties in low temperature plasma-enhanced chemical vapor deposition-synthesized MoO_xC_y thin films for flexible electrochromic devices [J] . Yung-Sen Lin, Jhen-Yi Lai, Tsung-Hsien Tsai, Thin Solid Films . 2011,第11期

机译：低温等离子体增强化学气相沉积合成柔性电致变色器件MoO_xC_y薄膜中氧的添加对电致变色性能的影响
2. Electrochromic performance of NiV_xO_y thin films deposited onto flexible PET/ITO substrates by reactive plasma sputtering for flexible electrochromic devices [J] . Y.-S. Lin, P.-W. Chen, D.-J. Lin Thin Solid Films . 2010,第24期

机译：柔性电致变色器件通过反应等离子体溅射沉积在柔性PET / ITO衬底上的NiV_xO_y薄膜的电致变色性能
3. Electrochromic performance of reactive plasma-sputtered NiOx thin films on flexible PET/ITO substrates for flexible electrochromic devices [J] . Lin Y.-S., Chen P.-W., Lin D.-J., Surface & Coatings Technology . 2010,第S1期

机译：用于柔性电致变色器件的柔性PET / ITO基板上反应性等离子溅射NiOx薄膜的电致变色性能
4. Low Temperature (75℃) Hydrogenated Nanocrystalline Silicon Films grown by Conventional Plasma Enhanced Chemical Vapor Deposition for Thin Film Transistors [C] . Czang-Ho Lee, Andrei Sazonov, Arokia Nathan Symposium Proceedings vol.808; Symposium on Amorphous and Nanocrystalline Silicon Science and Technology - 2004; 20040413-16; San Francisco,CA(US) . 2004

机译：常规等离子增强化学气相沉积薄膜晶体管生长的低温（75℃）氢化纳米晶硅薄膜
5. Preparation and characterization of lithium cobalt oxide by chemical vapor deposition for application in thin film battery and electrochromic devices. [D] . Kenny, Leo Thomas. 1996

机译：通过化学气相沉积法制备和表征钴酸锂锂，用于薄膜电池和电致变色器件。
6. Investigations on the Role of N2:(N2 + CH4) Ratio on the Growth of Hydrophobic Nanostructured Hydrogenated Carbon Nitride Thin Films by Plasma Enhanced Chemical Vapor Deposition at Low Temperature [O] . Noor Hamizah Khanis, Richard Ritikos, Shafarina Azlinda Ahmad Kamal, 2017

机译：N2：（N2 + CH4）比在低温等离子体增强化学气相沉积法生长疏水纳米结构氢化氮化碳薄膜中的作用研究
7. Electrochromic Devices Deposited on Low-Temperature Plastics by Plasma-Enhanced Chemical Vapor Deposition [O] . Robbins, Joshua, Seman, Michael 2005

机译：等离子体增强化学气相沉积法在低温塑料上沉积电致变色器件

Low Temperature Plasma Enhanced Chemical Vapor Deposition-Synthesized Electrochromic MoO_xC_y Thin Films for Flexible Electrochromic Devices

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