Stable Fourth-Harmonic Generation of a Q-Switched Nanosecond-Kilohertz Nd:YVO_4 Laser and Its Application to Dicing of Silicon Wafer

Tetsuo Harimoto; Boku Yo; Kosuke Uchida

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Stable Fourth-Harmonic Generation of a Q-Switched Nanosecond-Kilohertz Nd:YVO_4 Laser and Its Application to Dicing of Silicon Wafer

机译：Q开关纳秒千赫兹Nd：YVO_4激光器的稳定四谐波产生及其在硅片切块中的应用

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摘要

A simple scheme for the stable fourth-harmonic generation of a Q-switched nanosecond-kilohertz Nd:YVO_4 laser through a type-I β-barium borate crystal is presented. By heating the crystal at an optimized temperature, a conversion efficiency of up to 30.2% from 532 to 266 nm is achieved at a repetition rate of 20 kHz, and the fluctuation in average power at 266 nm is less than 0.9% at approximately 1.1 W. The application of the 266 nm laser to the laser dicing of a silicon wafer is also reported.

机译：提出了一种通过I型β-钡硼酸盐晶体稳定产生Q开关纳秒千赫兹Nd：YVO_4激光器的第四谐波的简单方案。通过在最佳温度下加热晶体，以20 kHz的重复频率实现从532 nm到266 nm的转换效率高达30.2％，并且在大约1.1 W时266 nm处的平均功率波动小于0.9％。还报道了将266nm激光应用于硅晶片的激光切割。

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《Japanese journal of applied physics》 |2012年第8issue1期|p.088001.1-088001.2|共2页
作者
Tetsuo Harimoto; Boku Yo; Kosuke Uchida;
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Faculty of Engineering, University of Yamanashi, Kofu 400-8511, Japan;

Faculty of Engineering, University of Yamanashi, Kofu 400-8511, Japan;

Faculty of Engineering, University of Yamanashi, Kofu 400-8511, Japan;

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专利

1. Compensation for the thermal effect in the second-harmonic generation of a Q-switched nanosecond-kilohertz Nd:YVO _4 laser [J] . Harimoto T., Yo B., Uchida K. Optical review . 2012,第5期

机译：补偿Q开关纳秒千赫兹Nd：YVO _4激光器二次谐波产生中的热效应
2. Compensation for the thermal effect in the second-harmonic generation of a Q-switched nanosecond-kilohertz Nd:YVO4 laser [J] . Tetsuo Harimoto, Boku Yo, Kosuke Uchida Optical Review . 2012,第5期

机译：Q开关纳秒千赫兹Nd：YVO4 激光器二次谐波产生的热效应补偿
3. Generation of nanosecond laser pulses at a 2.2-MHz repetition rate by a cw diode-pumped passively Q-switched Nd~(3+):YVO_4 laser [J] . Nghia N.T., Hao N.V., Orlovich V.A., Quantum electronics . 2011,第9期

机译：连续波二极管泵浦的被动Q开关Nd〜（3 +）：YVO_4激光器以2.2 MHz的重复频率产生纳秒激光脉冲
4. Highest-speed dicing of thin silicon wafers with nanosecond-pulse 355nm q-switched laser source using line-focus fluence optimization technique [C] . James M. Bovatsek, Rajesh S. Patel Laser-based micro- and nanopackaging and assembly IV . 2010

机译：纳秒级355nm调Q激光源采用线聚焦注量优化技术对薄硅晶片进行高速切割
5. High-power, picosecond pulse generation from Q-switched diode lasers. [D] . Yang, Sheng-Hui. 1996

机译：Q开关二极管激光器产生的高功率皮秒脉冲。
6. Epitaxial Growth of Silicon on Silicon Wafers by Direct Laser Melting [O] . Marie Le Dantec, Mustafa Abdulstaar, Marc Leparoux, 2020

机译：直接激光熔化硅晶片上的硅外延生长
7. Dicing of Thin Silicon Wafers with Ultra-Short Pulsed Lasers in the Range from 200 fs up to 10 ps [O] . Fornaroli, Christian, Holtkamp, Jens, Gillner, Arnold 2015

机译：超短脉冲激光器在200 fs至10 ps的范围内对薄硅晶片进行切割
8. Laser plasma generation of hydrogen-free diamond-like carbon thin films on Zr-2.5Nb CANDU pressure tube materials and silicon wafers with a pulsed high-power CO(sub 2) laser [R] . Ebrahim, N. A. , Mouris, J. F. , Hoffmann, C. R. J. , 1995

机译：激光等离子体在Zr-2.5Nb CaNDU压力管材料和硅片上用脉冲高功率CO（sub 2）激光器生成无氢类金刚石碳薄膜

Stable Fourth-Harmonic Generation of a Q-Switched Nanosecond-Kilohertz Nd:YVO_4 Laser and Its Application to Dicing of Silicon Wafer

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