...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Japanese journal of applied physics >Annealing Effect of W Incorporated Diamond-Like Carbon Fabricated by Ga Focused Ion Beam Chemical Vapor Deposition
【24h】

Annealing Effect of W Incorporated Diamond-Like Carbon Fabricated by Ga Focused Ion Beam Chemical Vapor Deposition

机译：Ga聚焦离子束化学气相沉积制备W掺入类金刚石碳的退火效应

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The effects of thermal annealing of W incorporated diamond-like carbon (W-DLC) films fabricated with focused ion beam chemical vapor deposition (FIB-CVD) were investigated using X-ray absorption fine structure near the carbon K-edge (C-K NEXAFS) and the combination of Rutherford backscattering (RBS) and elastic recoil detection analysis (ERDA). W-DLC films were annealed for 32 h at temperatures, T_a, between 673 and 1073K. Comparing the T_a dependences of Ga and H contents obtained from RBS-ERDA and the sp~2/(sp~2 +sp~3) ratios from C-K NEXAFS, it was found that even a trace amount of W incorporation into DLC films fabricated by Ga+ FIB-CVD may cause a significant sp~3 → sp~2 structural change.
机译：使用碳K边缘附近的X射线吸收精细结构（CK NEXAFS），研究了用聚焦离子束化学气相沉积（FIB-CVD）制造的掺W的类金刚石碳（W-DLC）薄膜的热退火效果。以及卢瑟福反向散射（RBS）和弹性反冲检测分析（ERDA）的组合。 W-DLC薄膜在673和1073K之间的温度T_a下退火32小时。比较从RBS-ERDA获得的Ga和H含量的T_a依赖性以及从CK NEXAFS获得的sp〜2 /（sp〜2 + sp〜3）比，发现即使微量的W掺入由DBS薄膜制成的DLC膜中Ga + FIB-CVD可能引起sp〜3→sp〜2的明显结构变化。

著录项

  • 来源
    《Japanese journal of applied physics》 |2011年第6issue2期|p.06GG05.1-06GG05.4|共4页
  • 作者

    Akira Wada; Tsuneo Suzuki; Masahito Niibe; Haruhiko Ito; Kazuhiro Kanda;

  • 作者单位

    Department of Materials Science and Technology, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan;

    Extreme Energy-Density Research Institute, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan;

    Extreme Energy-Density Research Institute, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan;

    Department of Materials Science and Technology, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan;

    Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678.1205, Japan;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号