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Characterization of Four-Points-Pinned Ring-Shaped Silicon Microeiectromechanical Systems Resonator

机译：四点固定环形硅微机电系统谐振器的表征

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摘要

A four-points-inner-pinned ring-shaped microeiectromechanical systems (MEMS) resonator has been investigated. The simulated comparison between disk- and ring-shaped resonators indicates that the amplitudes of the ring-shaped resonators are more than ten times larger than those of the disk-shaped ones for modes with the same resonant frequency. Three types of anchor configuration for the ring-shaped resonators, inner-pinned, outer-pinned, and center-fixed, were compared. The results show that, for the inner-pinned ring-shaped resonator, three fundamental resonant modes occur close to each other, although this resonator is the smallest and does not suffer from the effect of misalignment as a result of one mask fabrication. A new method to identify each fundamental resonant mode has been proposed and successfully adapted for evaluating the frequency characteristics of fabricated resonators. The fabricated ring-shaped resonator had a radial-contour-common (RCC) resonant mode at 1.615 MHz with a Q-factor of over 30,000. These values agreed at 98.9% accuracy with those of the simulated resonator.
机译：研究了一种四点内固定环形微机电系统（MEMS）谐振器。盘形和环形谐振器之间的模拟比较表明，对于具有相同谐振频率的模式，环形谐振器的幅度比盘形谐振器的幅度大十倍以上。比较了环形谐振器的三种类型的锚固件配置，即内部固定，外部固定和中心固定。结果表明，对于内销形环形谐振器，虽然该谐振器是最小的，并且不遭受由于一次掩模制造而引起的未对准的影响，但三个基本谐振模式彼此接近。已经提出了一种识别每个基本谐振模式的新方法，该方法成功地用于评估已制成谐振器的频率特性。所制造的环形谐振器在1.615 MHz处具有径向轮廓共模（RCC）谐振模式，Q因子超过30,000。这些值与仿真谐振器的精度一致，为98.9％。

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  • 来源
    《Applied physics express》 |2010年第6issue2期|P.06GN05.1-06GN05.8|共8页
  • 作者

    Tomohiro Oka; Hiroshi Tanigawa; Kenichiro Suzuki;

  • 作者单位

    College of Science and Engineering, Ritsumeikan University, 1-1-1 Noji-higashi, Kusatsu, Shiga 525-8577, Japan;

    Research Organization of Science and Engineering, Ritsumeikan University, 1-1-1 Noji-higashi, Kusatsu, Shiga 525-8577, Japan;

    College of Science and Engineering, Ritsumeikan University, 1-1-1 Noji-higashi, Kusatsu, Shiga 525-8577, Japan;

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