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首页> 外文期刊>Japanese journal of applied physics >Dynamic Characteristics of Laser-Assisted Discharge Plasmas for Extreme Ultraviolet Light Sources
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Dynamic Characteristics of Laser-Assisted Discharge Plasmas for Extreme Ultraviolet Light Sources

机译：极紫外光源激光辅助放电等离子体的动态特性

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摘要

This paper reports the dynamics of laser-assisted discharge plasmas for extreme ultraviolet (EUV) sources. A pulsed laser was focused on the tin cathode surface to form vapor jet across 5 mm long anode-cathode gap where pulsed power was applied later on. Comparison of time-resolved pinhole EUV imaging and high speed visible photography reveals that intensive EUV is emitted only from the neck of the hot plasma, which starts showing up near the laser spot on the cathode and moves away from the cathode. This movement of the neck plasma results in the enlargement of the EUV emissive region acting as its source.
机译：本文报道了用于极紫外（EUV）光源的激光辅助放电等离子体的动力学。将脉冲激光聚焦在锡阴极表面上，以形成跨越5毫米长的阳极-阴极间隙的蒸气射流，随后再施加脉冲功率。时间分辨的针孔EUV成像与高速可见摄影的比较表明，密集的EUV仅从热等离子体的颈部发射，该等离子体开始在阴极上的激光点附近出现并远离阴极。颈部等离子体的这种运动导致EUV发射区（作为其来源）的扩大。

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  • 来源
    《Japanese journal of applied physics》 |2010年第9issue1期|p.096202.1-096202.4|共4页
  • 作者

    Peng Lu; Sunao Katsuki; Nobufumi Tomimaru; Takahisa Ueno; Hidenori Akiyama;

  • 作者单位

    Graduate School of Science and Technology, Kumamoto University, 39-1 Kurokami 2-chome, Kumamoto 860-8555, Japan;

    rnGraduate School of Science and Technology, Kumamoto University, 39-1 Kurokami 2-chome, Kumamoto 860-8555, Japan;

    rnGraduate School of Science and Technology, Kumamoto University, 39-1 Kurokami 2-chome, Kumamoto 860-8555, Japan;

    rnGraduate School of Science and Technology, Kumamoto University, 39-1 Kurokami 2-chome, Kumamoto 860-8555, Japan;

    rnGraduate School of Science and Technology, Kumamoto University, 39-1 Kurokami 2-chome, Kumamoto 860-8555, Japan;

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