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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >A Study on Removal of Shoulders at Laser Ablated Indium Tin Oxide Film Edge
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A Study on Removal of Shoulders at Laser Ablated Indium Tin Oxide Film Edge

机译：激光烧蚀铟锡氧化物薄膜边缘肩部去除的研究

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摘要

A diode-pumped Q-switched Nd:YVO_4 laser (λ = 1064nm) was used for the fabrication of plasma display panel (PDP) bus electrodes. In the experiments, with the maskless laser direct patterning of indium tin oxide (ITO) films, the laser-ablated ITO patterns showed the formation of shoulders at the edge of the ITO lines and a ripplelike structure with the etched bottom compared with the chemically wet-etched ITO patterns. Using a Q-switched Nd:YVO_4 laser and a galvanometric scanning system, 500 mm/s with a 40 kHz repetition rate was found to be appropriate for application to PDP manufacturing. By dipping the laser-ablated ITO films in the chemical etching solution for 30 s at 50℃, the shoulders were effectively removed without affecting the discharging properties of ac-PDP.
机译：二极管泵浦的Q开关Nd：YVO_4激光器（λ= 1064nm）用于制造等离子体显示面板（PDP）总线电极。在实验中，通过对铟锡氧化物（ITO）膜进行无掩模激光直接图案化，激光烧蚀的ITO图案与化学湿法相比显示出在ITO线的边缘形成了肩部，并且在蚀刻的底部形成了波纹状结构蚀刻的ITO图案。使用调Q的Nd：YVO_4激光器和检流扫描系统，发现500 mm / s和40 kHz的重复频率适用于PDP制造。通过将激光烧蚀的ITO膜在50℃下浸入化学蚀刻溶液中30 s，可以有效去除肩部，而不会影响ac-PDP的放电性能。

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