Synthesis of aluminum fluoride (AIF_3) powder by direct evaporation of aluminum (Al) granules in an atmospheric microwave-plasma torch demonstrates a possibility of a direct continuous preparation. The solid-phase Al granules are injected axially by Ar gas. H_2, CF_4, and N_2 as a swirl gas are used for fluorination of Al granule and plasma stabilization. The as-produced samples were characterized by X-ray diffraction (XRD) and Fourier transform infrared (FTIR). The average crystal size obtained from the Williamson-Hall plot was approximately 37nm. The surface area and pore distribution properties of the particles were also analyzed by making use of the nitrogen absorption method.
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