Extrasmall-Area Three-Dimensional Solenoid-Shaped Inductor Integrated into High-Speed Signal Processing Complementary Metal-Oxide-Semiconductor Ultralarge-Scale Integrated Circuits

Ken-ichiro Hijioka; Akira Tanabe; Yasushi Amamiya; Yoshihiro Hayashi

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Extrasmall-Area Three-Dimensional Solenoid-Shaped Inductor Integrated into High-Speed Signal Processing Complementary Metal-Oxide-Semiconductor Ultralarge-Scale Integrated Circuits

机译：集成到高速信号处理互补金属氧化物半导体超大规模集成电路中的超小面积三维螺线管形状的电感器

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摘要

Using fine-pitched ultralarge-scale integrated (ULSI) circuit local interconnects, an extrasmall-area, three-dimensional (3-D) solenoid-shaped inductor is developed for scaled-down high-speed logic LSIs. The 3-D solenoid inductor has a four-layered soleno

机译：利用细间距的超大规模集成电路（ULSI）电路局部互连，为缩小规模的高速逻辑LSI开发了超小面积，三维（3-D）螺线管形电感器。 3-D电磁感应器具有四层电磁阀

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来源
《Japanese journal of applied physics》 |2008年第4issue2期|2477-2483|共7页
作者
Ken-ichiro Hijioka; Akira Tanabe; Yasushi Amamiya; Yoshihiro Hayashi;
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正文语种 eng
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on-chip inductor; high-speed logic; inductor peaking; low-k/Cu interconnects;

机译：片上电感器;高速逻辑;电感峰值;低k / Cu互连;

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专利

1. Vertically integrated, three-dimensional nanowire complementary metal-oxide-semiconductor circuits [J] . SungWoo Nam, Xiaocheng Jiang, Qihua Xiong, Proceedings of the National Academy of Sciences of the United States of America . 2009,第50期

机译：垂直集成的三维纳米线互补金属氧化物半导体电路
2. GaAs low-power integrated circuits for a high-speed digital signal processor [J] . Singh H.P., Sadler R.A. IEEE Transactions on Electron Devices . 1989,第2期

机译：用于高速数字信号处理器的GaAs低功耗集成电路
3. A High-Speed, High-Accuracy Optical Position Sensor Integrated with an Analog and Digital Signal-Processing Circuit [J] . KOZO OHTANI, MITSURU BABA Electronics and communications in Japan . 2011,第12期

机译：集成了模拟和数字信号处理电路的高速，高精度光学位置传感器
4. #x0022;Green#x0022; On-chip Inductors in Three-Dimensional Integrated Circuits [C] . Tida Umamaheswara Rao, Mittapalli Varun, Zhuo Cheng, IEEE Computer Society Annual Symposium on VLSI . 2014

机译：三维集成电路中的“绿色”片上电感器
5. Signal generation and processing in high-frequency/high-speed silicon-based integrated circuits. [D] . Wu, Hui. 2003

机译：高频/高速硅基集成电路中的信号生成和处理。
6. Vertically integrated three-dimensional nanowire complementary metal-oxide-semiconductor circuits [O] . SungWoo Nam, Xiaocheng Jiang, Qihua Xiong, 2009

机译：垂直集成的三维纳米线互补金属氧化物半导体电路
7. Vertically integrated, three-dimensional nanowire complementary metal-oxide-semiconductor circuits [O] . Nam, SungWoo, Jiang, Xiaocheng, Xiong, Qihua, 2009

机译：垂直集成的三维纳米线互补金属氧化物半导体电路

Extrasmall-Area Three-Dimensional Solenoid-Shaped Inductor Integrated into High-Speed Signal Processing Complementary Metal-Oxide-Semiconductor Ultralarge-Scale Integrated Circuits

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