Imprint Property of Optical Mach-Zehnder Interferometers Using (Ba,Sr)TiO_3 Sputter-Deposited at 450 ℃

Masato Suzuki; Kazuma Nagata; Shin Yokoyama

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Imprint Property of Optical Mach-Zehnder Interferometers Using (Ba,Sr)TiO_3 Sputter-Deposited at 450 ℃

机译：（Ba，Sr）TiO_3溅射沉积在450℃的光学马赫曾德尔干涉仪的压印特性

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We have evaluated a change in optical modulation of Mach-Zehnder interferometers (MZIs) after bias temperature (BT) stress. Phase shifters of MZIs are made of (Ba,Sr)TiO_3 (BST) films, which are sputter-deposited at 450 ℃, which is an acceptable temperatu

机译：我们评估了偏置温度（BT）应力后Mach-Zehnder干涉仪（MZIs）的光学调制变化。 MZI的移相器由（Ba，Sr）TiO_3（BST）薄膜制成，该薄膜在450℃溅射沉积，这是可接受的温度

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来源
《Japanese journal of applied physics》 |2008年第4issue2期|2897-2901|共5页
作者
Masato Suzuki; Kazuma Nagata; Shin Yokoyama;
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正文语种 eng
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(Ba,Sr)TiO_3 (BST); mach-zehnder interferometer; optical modulation; imprint effect; Si photonics;

机译：（Ba;Sr）TiO_3（BST）;马赫曾德尔干涉仪光调制烙印效果;硅光子学;

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1. Investigation of structure, optical, nonlinear optical, dielectrical properties and electronic results of La_(0.01)Ba_(0.99)TiO_3, Sm_(0.5)Sr_(0.5)CoO_3 and Sm_(0.5)Sr_(0.5)CoO_3/La_(0.01)Ba_(0.99)TiO_3 thin films grown on quartz substrates using pulsed laser deposition (PLD) technique [J] . Moez A. Abdel, Kim Y. S., Ali Ahmed I. Journal of Optics . 2021,第2期

机译：结构，光学，非线性光学，电介质特性和LA_（0.01）BA_（0.99）TiO_3，SM_（0.5）SR_（0.5）COO_3和SM_（0.5）SR_（0.01）BA_（0.01）BA_的电子结果（0.99）使用脉冲激光沉积（PLD）技术在石英基板上生长的TiO_3薄膜
2. Design of Optical SR Latch and Flip-Flop Using Electro-Optic Effect Inside Lithium-Niobate-Based Mach-Zehnder Interferometers [J] . Amrindra Pal, Santosh Kumar, Sandeep Sharma Journal of Optical Communications . 2019,第2期

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3. Transient Response in Monolithic Mach-Zehnder Optical Modulator Using (Ba,Sr)TiO_3 Film Sputtered at Low Temperature on Silicon [J] . Masato Suzuki, Kazuma Nagata, Yuichiro Tanushi, Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2007,第4B期

机译：（Ba，Sr）TiO_3薄膜低温溅射在硅上的单片Mach-Zehnder光调制器的瞬态响应
4. Regenerative Properties of Bulk and Quantum Dot SOA Based All-Optical Mach-Zehnder Interferometer DPSK Wavelength Converters [C] . Jin Wang, Yang Jiao, Rene Bonk, International Conference on Photonics in Switching . 2006

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机译：用于检测生物制剂的光学集成mach-Zehnder干涉仪的表征。

Imprint Property of Optical Mach-Zehnder Interferometers Using (Ba,Sr)TiO_3 Sputter-Deposited at 450 ℃

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