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首页> 外文期刊>Japanese journal of applied physics >Acceptorlike Behavior Of Defects In Sige Alloys Grown By Molecular Beam Epitaxy
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Acceptorlike Behavior Of Defects In Sige Alloys Grown By Molecular Beam Epitaxy

机译:分子束外延生长的Sige合金中缺陷的受体样行为

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摘要

The Ge composition dependence of the densities and energy levels of the acceptorlike defect states that are generated during the solid-source molecular beam epitaxy (SSMBE) of SiGe films was investigated. Hall measurements in a wide temperature range were carried out, and a previously unreported very shallow acceptorlike state was found. We provide evidence that the observed acceptorlike states are relevant to intrinsic point defects.
机译:研究了在SiGe薄膜的固体源分子束外延(SSMBE)期间产生的受体样缺陷态的密度和能级的Ge组成依赖性。在宽温度范围内进行了霍尔测量,发现了以前未报道的非常浅的受体样状态。我们提供证据表明观察到的受体样态与内在点缺陷有关。

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